GB/T 18994-2014 in English
SUPERSEDEDGases for electronic industry―High purity chlorine
- Issued on:2014-12-22
- Implemented on:2015-07-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$156.00
《GB/T 18994-2014电子工业用气体 高纯氯》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC1(全国半导体设备和材料标准化技术委员会气体分会)执行,主管部门为国家标准化管理委员会。
本标准规定了高纯氯的技术要求、试验方法、检验规则及包装、标志、运输和储存。
本标准适用于以工业液氯为原料,采用物理吸附等过程生产的高纯氯产品。该产品主要用于大规
模集成电路、光导纤维、高温超导、平板显示器、太阳能等技术领域。
分子式:Cl2。
相对分子质量:70.90(按2009年国际相对原子质量计算)。
Scope
This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, transportation and storage of high-purity chlorine. This standard applies to high-purity chlorine products produced using industrial liquid chlorine as raw material and using processes such as physical adsorption. This product is mainly used in technical fields such as large-scale integrated circuits, optical fibers, high-temperature superconductors, flat panel displays, and solar energy. Molecular formula: Cl2. Relative molecular mass: 70.90 (calculated according to the international relative atomic mass in 2009).

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