GB/T 24468-2009 in English

《GB/T 24468-2009半导体设备可靠性、可用性和维修性（RAM）的定义和测量规范》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准定义了设备的六个基本状态，所有的设备条件和阶段都必须归入这六个状态。设备的状态由功能决定，而不管是由谁来执行此功能。本规范中所涉及的设备可靠性的测量主要集中在设备失效和设备使用的关系上，而不是设备失效和设备经历的(日历)总时间之间的关系。

Scope

This standard establishes a common basis for communication between users and equipment suppliers of semiconductor manufacturing equipment (hereinafter referred to as equipment) by providing measurement criteria for the reliability, availability and maintainability (hereinafter referred to as RAM) performance of semiconductor manufacturing equipment (hereinafter referred to as equipment) in a manufacturing environment . This standard defines six basic states of equipment, and all equipment conditions and stages must be classified into these six states. The state of a device is determined by a function, regardless of who performs the function. The measurements of equipment reliability referred to in this specification focus primarily on the relationship between equipment failure and equipment usage, rather than the relationship between equipment failure and the total (calendar) time experienced by the equipment. Chapter 5 (Status of the device) of this standard defines how the time of the device is classified, and Chapter 6 (RAM measurement) defines the formula for measuring the performance of the device. Chapter 7 (Measurement of Uncertainty) gives a statistical method for evaluating calculated performance quantities. Effective implementation of this standard requires that the (RAM) performance of the device can be tracked through the device's runtime and cycles. Automatic tracking of equipment status is outside the scope of this standard, which is covered by SEMI E58. Clear and effective communication between users and suppliers can promote continuous improvement of equipment performance. The RAM indicators in this standard can be directly applied to non-clustered equipment at the level of the entire equipment and subsystems, and can also be used at the level of subsystems (such as process modules) for multi-channel clustered equipment.