GB/T 31352-2014 in English
VALIDTest methods for warp of sapphire substrates
- Issued on:2014-12-31
- Implemented on:2015-09-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$146.00
《GB/T 31352-2014蓝宝石衬底片翘曲度测试方法》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了蓝宝石切割片、研磨片、抛光片(以下简称蓝宝石衬底片)翘曲度的测试方法提要、干扰因素、仪器和设备、试样、测试环境、测试程序、测试结果的计算、精密度以及试验报告。
本标准适用于直径50.8mm~304.8mm,厚度为不小于200μm的蓝宝石衬底片翘曲度的测试。
Scope
This standard specifies the test method for the warpage of sapphire cutting discs, grinding discs and polishing discs (hereinafter referred to as sapphire substrate discs). This standard applies to the warpage test of sapphire substrates with a diameter of 50.8 mm to 304.8 mm and a thickness of not less than 200 μm.

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