GB/T 32996-2016 in English
SUPERSEDEDSurface chemical analysis-Analysis of metal oxide films by glow-discharge optical emission spectrometry
- Issued on:2016-10-13
- Implemented on:2017-09-01
- File Format:PDF
- Delivery:Via email within 5 business days
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《GB/T 32996-2016表面化学分析 辉光放电发射光谱法分析金属氧化物膜》由TC38(全国微束分析标准化技术委员会)归口,TC38SC2(全国微束分析标准化技术委员会表面化学分析分会)执行,主管部门为国家标准化管理委员会。
Scope
This standard specifies the method for the determination of metal oxide film thickness, mass per unit area and chemical composition of metal oxide films by glow discharge emission spectroscopy. This method is suitable for the determination of oxide films with a thickness of 1 nm to 10 000 nm on metals. The metal elements of oxides include one of iron, chromium, nickel, copper, titanium, silicon, molybdenum, zinc, magnesium, manganese and aluminum. one or more species. Other measurable elements include oxygen, carbon, nitrogen, hydrogen, phosphorus and sulfur.

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