GB/T 33763-2017 in English

VALID

Test method for dislocation density of sapphire single crystal

Issued on:2017-05-31
Implemented on:2017-12-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $120.00
$117.00

Standard No:	GB/T 33763-2017
Document status:	VALID
Title in English:	Test method for dislocation density of sapphire single crystal
Title in Chinese:	蓝宝石单晶位错密度测量方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2017-05-31
Implemented on:	2017-12-01
ICS Classification:	77.040-Testing of metals
Chinese Classification:	H25-Metal chemical property test method
Professional Classification:	GB-National Standard
Related Keywords:	sapphire single crystal single crystal industry standards scope dislocation density measurement dislocation density single crystal materials
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《GB/T 33763-2017蓝宝石单晶位错密度测量方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Introduction

1. Background and significance of the standard

GB/T 33763—2017 "Measurement Method for Dislocation Density of Sapphire Single Crystal" is an important standard for the application of sapphire single crystal materials in semiconductors and other high-tech fields. With the rapid development of semiconductor technology, sapphire single crystal, as a key material, has put forward higher requirements for the accurate measurement of dislocation density. This standard is managed by the National Technical Committee for Semiconductor Equipment and Materials Standardization, combining the latest research results and technical practices in the industry.

2. Scope and applicable conditions of the standard

This standard is applicable to the measurement of dislocation density of sapphire single crystals with a dislocation density of 0/cm² to 100,000/cm² after polishing, and the detection surfaces include {0001}, {1120}, {1012} and {1010} crystal planes. The standard specifies the technical requirements and operating specifications of the measurement method to ensure good consistency and comparability of results between different laboratories.

3. Comparison of standard frameworks

Standard dimensions	GB/T 33763—2017	Comparison with international standards	Differences in industry standards
Scope	Dislocation density measurement of sapphire single crystal	Covering a variety of crystal materials	Domestic standards focus more on sapphire
Detection methods	Chemical etching method + microscope observation	Includes supplementary methods such as X-ray diffraction	No complex instruments and equipment are adopted
Precision requirements	±4.5% precision, repeatability ±3.5%, reproducibility ±2.8%	No clear precision requirement	Higher than some international standards

4. Implementation recommendations

4.1 Equipment selection and calibration

Metallurgical microscope: Select equipment with a magnification range of 50x~500x to ensure that the field of view meets the standard requirements. Regularly calibrate the resolution and measurement accuracy of the microscope.

4.2 Personnel training

Operators must undergo professional training and be familiar with chemical corrosion technology, microscopic observation techniques and data processing methods. It is recommended to conduct internal assessments and technical exchanges regularly.

4.3 Data Recording and Analysis

Establish a unified data recording template to ensure the traceability of test results. Use professional software to perform statistical analysis on dislocation density and generate a standardized report format.

5. Conclusion

The implementation of GB/T 33763—2017 will effectively improve the quality control level of sapphire single crystal materials and promote technological progress in my country's semiconductor industry. Through the continuous improvement of standards and technological innovation, breakthroughs in higher precision and wider application fields in the future are worth looking forward to.

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Sample only — not a preview of GB/T 33763-2017