GB/T 34481-2017 in English

VALID

Test method for measuring etch pit density(EPD) in low dislocation density monocrystalline germanium slices

Issued on:2017-10-14
Implemented on:2018-07-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $70.00
$68.00

Standard No:	GB/T 34481-2017
Document status:	VALID
Title in English:	Test method for measuring etch pit density(EPD) in low dislocation density monocrystalline germanium slices
Title in Chinese:	低位错密度锗单晶片腐蚀坑密度(EPD)的测量方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2017-10-14
Implemented on:	2018-07-01
ICS Classification:	77.040-Testing of metals
Chinese Classification:	H25-Metal chemical property test method
Professional Classification:	GB-National Standard
Related Keywords:	low dislocation density germanium low dislocation density germanium single wafers low dislocation density germanium single wafers gb/t dislocation density low dislocation density monocrystalline germanium slices introduction introduction
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《GB/T 34481-2017低位错密度锗单晶片腐蚀坑密度（EPD）的测量方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Introduction

Introduction: Background of the Standardization of Low Dislocation Density Germanium Single Wafers

GB/T 34481-2017 "Measurement Method of Etch Pit Density (EPD) of Low Dislocation Density Germanium Single Wafers" is an important standard customized for the semiconductor industry, mainly used to detect the dislocation density of germanium single wafers. The standard was proposed and managed by the National Technical Committee for Semiconductor Equipment and Materials Standardization, and the drafting units include Yunnan Zhongke Xinyuan Crystal Materials Co., Ltd., Yunnan Lincang Xinyuan Germanium Industry Co., Ltd. and the Institute of Semiconductors of the Chinese Academy of Sciences. These institutions are all top companies in the research and production of germanium materials in China, ensuring the scientificity and practicality of the standard.

Comparison of standard frameworks: dimensional analysis of relevant domestic and foreign standards

Standard name	Scope of application	Technical requirements	Test method
GB/T 34481—2017	Low dislocation density germanium single crystal	Circular germanium single crystal with a dislocation density of less than 1000/cm² and a diameter of 75mm~150mm	Chemical etching method combined with microscope observation
GB/T 5252	General germanium single crystal dislocation density test	Applicable to germanium single crystals with a variety of dislocation density ranges	Microscope observation is the main method, and chemical corrosion is the auxiliary method.

Technical implementation: Specific steps for measuring the density of corrosion pits

1. Sample preparation:Prepare the dislocation density test piece of germanium single crystal according to the provisions of GB/T 5252. Ensure that the surface of the sample is smooth and has no obvious defects.

2. Select measurement points:Take the germanium single crystal with a diameter of 100mm as an example, as shown in Figure 4, 37 square measurement points are arranged on the wafer, and the side length of each square is 13mm. Other sizes such as 75mm and 150mm wafers use square side lengths of 10mm and 21.8mm respectively.

3. Record the number of corrosion pits:Use a microscope with a magnification of 200x to observe and record the number of corrosion pits in the field of view of each measurement point. If the pits are too close together, it is recommended to increase the microscope magnification to ensure accurate counting.

Implementation Recommendations: How to Apply This Standard in Actual Production

Instrument Calibration:Calibrate the metallographic microscope regularly to ensure the accuracy of measuring the field of view area. It is recommended to use a standard gauge to verify the field of view size.
Staff Training:Provide detailed training to operators, including how to correctly select measurement points, accurately count pits, and deal with possible measurement errors.
Data Recording and Analysis:Establish a unified data recording form to ensure that the number of pits and microscope magnification at each measurement point are accurately recorded. Use statistical software to calculate the average dislocation pit density and perform necessary quality control analysis.

More samples: GB 50021-2001(2009) DL/T 5154-2012 JJG 21-2008

Sample only — not a preview of GB/T 34481-2017

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