GB/T 34898-2017 in English
VALIDMicro electromechanical system technology-Test method for the nonlinear vibration of the MEMS resonant sensitive element
- Issued on:2017-11-01
- Implemented on:2018-05-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$214.00
《GB/T 34898-2017微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法》由TC336（全国微机电技术标准化技术委员会）归口，主管部门为国家标准化管理委员会。
Introduction
1. Standard Overview
GB/T 34898-2017 "Microelectromechanical System (MEMS) Technology MEMS Resonant Sensing Element Nonlinear Vibration Test Method" specifies the test method for the nonlinear vibration characteristic parameters of MEMS resonant sensitive elements in resonant sensors. It is suitable for testing the nonlinear vibration characteristics of sensitive elements and the frequency offset of the closed-loop system of sensitive elements during the development and production process.
2. Comparison of standard frameworks
| Standard framework dimensions | Optical test method | Electrical test method | Applicable scenarios |
|---|---|---|---|
| Test equipment | Laser vibrometer, microscopic optical device | Lock-in amplifier, signal generator | Used after sensor packaging is completed |
| Test principle | Laser Doppler vibrometer technology | Electrical signal detection and analysis | Vibration characteristics analysis |
| Data processing | Displacement calculation, frequency response curve analysis | Amplitude and phase calculation | Sensor Performance Evaluation |
3. Implementation Recommendations
Equipment Calibration:Before conducting nonlinear vibration tests, ensure that all test equipment (such as laser vibrometers and lock-in amplifiers) are calibrated to ensure the accuracy of the measurement data.
Test Environment Control:Environmental conditions should be strictly controlled during the test, including temperature (23°C ±5°C), humidity (30%~70%), and vibration isolation measures to prevent external interference from affecting the test results.
Data Recording and Analysis:It is recommended to record the parameter settings, measurement data, and curves of each test in detail, and use professional software for data analysis to ensure accurate evaluation of nonlinear vibration characteristics.
Regular Maintenance:In order to maintain the long-term performance stability of the equipment, it is recommended to regularly maintain and update the test equipment, especially the calibration and inspection of the optical and electrical parts.
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