GB/T 38446-2020 in English
VALIDMicro-electromechanical system technology—Test methods for tensile property measurement of strip thin films
- Issued on:2020-03-06
- Implemented on:2020-10-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$117.00
《GB/T 38446-2020微机电系统（MEMS）技术 带状薄膜抗拉性能的试验方法》由TC336（全国微机电技术标准化技术委员会）归口，主管部门为国家标准化管理委员会。
Introduction
Analysis of the core content of the standard
This standard establishes a systematic mechanical properties evaluation system for key thin film materials in MEMS devices. The main test indicators include:
- Elastic modulus: reflects the material's ability to resist elastic deformation
- Yield strength: identifies the critical point where the material begins to undergo plastic deformation
- Tensile strength: characterizes the material's maximum bearing capacity
Comparative analysis of test methods
| Test dimension | Traditional tensile method | This standard method | Advantage comparison |
|---|---|---|---|
| Sample size | Millimeter level | Micrometer level (length-to-thickness ratio>300) | Adapt to MEMS process characteristics |
| Equipment requirements | Universal testing machine | Nanoindenter system | Resolution up to 0.1% |
| Environmental control | Conventional laboratory | Precise temperature and humidity control | Reduce the impact of thermal drift |
Key technical points
Sample preparation specifications
Appendix A details the preparation process using the Deep Reactive Ion Etching (DRIE) process. Special attention should be paid to the following:
- The thickness of the adhesive layer needs to be controlled within the range of 10-20nm
- The patterning error should be <5% of the design size
- Residual stress release treatment is essential
Error compensation mechanism
According to the requirements of Appendix C, the test system needs to perform double compensation:
- Thermal drift compensation: Eliminate environmental fluctuations through no-load baseline calibration
- Spring stiffness compensation: Deduct the error introduced by the deformation of the instrument itself
Implementation suggestions
The following suggestions are made based on the experience of standard implementation:
- Preferably use diamond wedge indenter (radius ≈ sample thickness)
- The displacement rate should meet the order of L×10-4/s
- Three-dimensional laser confocal calibration is required before testing
- It is recommended to repeat the test for each group of samples ≥5 times
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