GB/T 36053-2018 in English

This standard provides detailed guidelines on the use of X-ray reflection methods to measure the thickness, density, and interface width of thin films. It covers essential aspects such as instrument requirements, collimation and positioning, data acquisition, and data analysis and reporting. The document outlines specific procedures to ensure accurate and consistent results in the measurement process. It also specifies the necessary conditions for experimental setup and data interpretation. The standard is structured to support both the technical implementation and the documentation of measurement activities. All relevant parameters and operational steps are clearly defined to facilitate the application of the method in various testing environments.