GB/T 37007-2018 in English

Standard Formulation Background and Technology Evolution Analysis

Electronic Grade Trimethyl GalliumAs an important component of semiconductor materials, its purity and impurity content directly affect the performance of compound semiconductor thin film materials. GB/T 37007—2018 standard has formulated strict technical requirements based on three chemical synthesis methods (gallium-magnesium alloy method, gallium trichloride method, and Grignard reagent method).

This standard was proposed by the National Technical Committee for Standardization of Semiconductor Equipment and Materials to meet the needs of high-end electronic devices for high-purity metal organic compounds. As the semiconductor industry develops towards higher integration, the purity requirements for raw materials continue to increase. This standard fills the gap in related fields in China.

Technical Requirements and Impurity Analysis

Test methods and testing equipment

Trimethylgallium purity determination The formula calculation method (Formula 1):

• Wherein, w is the purity of trimethylgallium (%)
• w₁-w₅ are the contents of silicon, copper, magnesium, zinc and iron respectively (μg/g)

Metal element detection adopts inductively coupled plasma atomic emission spectrometry (ICP-OES), which has the following characteristics:

• Instrument resolution: ≤0.01 nm
• Wavelength range: 160 nm~800 nm
• Detection limit: less than the indicators listed in Table 1

Nuclear Magnetic Resonance Test and Organic Impurity Analysis

Organic impurities are detected by low-temperature superconducting Fourier transform nuclear magnetic resonance (NMR):

• Methyl peak signal-to-noise ratio requirement: ≥50×10⁴
• After deducting the blank peak, if no methoxyl group and other impurity peaks are detected, the product is qualified.

Implementation suggestions

Trimethylgallium production and use should follow the following suggestions:

1. Strictly follow the standards for raw material screening and production process control.
2. Establish a complete quality inspection system to ensure that the product meets the requirements of GB/T 37007.
3. Strengthen the sealing management of packaging and transportation to avoid oxidation or moisture contamination.
4. Operators must wear protective equipment to prevent direct contact with and inhalation of harmful gases.