GB/T 37403-2019 in English

Interpretation of the core content of the standard

This standard specifies the technical requirements for the three concentration systems (25%, 20%, 2.38%) and their classification (Class I/II/III) of tetramethylammonium hydroxide (TMAH) developer for TFT-LCD manufacturing. The following indicators are focused on:

Innovation of detection method

1. Automatic potentiometric titration technology

For the first time, the standard uses automatic potentiometric titration as the arbitration method for TMAH content determination. Compared with traditional acid-base titration:

• The resolution is up to 0.001pH, and the error is less than 0.2%
• The three-jump point is used to determine carbonate (EP1→EP2→EP3)
• Equipped with aqueous composite pH electrode, the external reference solution is 3mol/L KCl

2. Trace metal detection

Through class=instrument>ICP-MS detects 23 kinds of metal impurities, critical control points:

Key points for implementation

1. Packaging specifications:HDPE barrels or PTFE-lined tank trucks must be used and marked with corrosive material signs (GB190)
2. Sampling requirements:800mL of sample must be placed in a Class 2 clean environment (GB50073) for 30 minutes before packaging
3. Storage conditions:Store below 25°C in the dark, with a shelf life of 12 months. It is strictly forbidden to store it with acidic substances

Technology evolution analysis

Compared with the earlier version, this standard has the following major upgrades:

• Added a new 2.38% low-concentration specification detection method
• The metal ion detection limit has been increased from ppm to ppb
• The lower limit of particle detection size has been extended to 0.1μm (GB/T11446.9)