GB/T 40344.1-2021 in English
VALIDVacuum technology—Standard methods for measuring vacuum-pump performance—Part 1:General description
- Issued on:2021-08-20
- Implemented on:2022-03-01
- File Format:PDF
- Delivery:Via email within 5 business days
$359.00
《GB/T 40344.1-2021真空技术 真空泵性能测量标准方法 第1部分:总体要求》由TC18(全国真空技术标准化技术委员会)归口,主管部门为中国机械工业联合会。
Introduction
Analysis of the core content of the standard
| Measurement method | Applicable pressure range | Main advantages | Uncertainty requirements |
|---|---|---|---|
| Flow method | Full pressure range | Directly measure gas flow | <10% |
| Small hole method | High vacuum (below 10-3Pa) | Avoid small flow measurement | <10% |
| Evacuation method | Low and medium vacuum | High degree of automation | <10% |
Key technology implementation points
1. Test hood design specifications
The standard clearly stipulates that the nominal diameter of the test hood DN must be consistent with the pump inlet, and a 45° conical adapter must be used for pumps with DN<100mm. The test hood should include:
- Pressure measurement interface (at height D/2)
- Temperature monitoring point
- Optional baking device (150-300℃)
2. Volume flow rate measurement comparison
Key formula of flow method:
qV = Q/(p1-pb)
The measurement of gas flow Q should pay attention to temperature correction: TD/Tf
Small hole method conductance calculation:
For air at 20℃:
Cair = 91d2/(1+δ/d) [L/s]
Required molecular flow conditions: mean free path l ≥ 2d
Measurement uncertainty control
According to the requirements of Appendix B, each method must meet the following requirements:
- Pressure measurement ≤ 3%
- Flow measurement ≤ 2.5%
- Aperture diameter ≤ 0.5%
- Final combined uncertainty ≤ 10%
Special note: When l ≈ 2d, the aperture conductance needs to be corrected by 3%
Standard implementation recommendations
- When measuring basic pressure, baking for 3h@120℃ is required for pressures above 10-4Pa, and 48h@300℃ is required for ultra-high vacuum
- Compression ratio measurement should use test gas with a purity of ≥ 99.999%
- The measurement cycle Δt1 of the vacuum method needs to be > 8s to eliminate the influence of valve delay
- All measuring equipment must provide ISO/IEC17025 calibration certificates

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