GB/T 43366-2023 in English

Example: A R-IV QX-1002 means:

1. A - Quality assurance grade A
2. R - Total dose resistance 10³Gy(Si)
3. IV - Single event effect threshold ≥75MeV·cm²/mg
4. QX-1002 - Device model
M 30 Low Earth Orbit Satellite H 10⁴ Deep Space Detector

5.9 SEM inspection standards

SEM resolution is required to be ≤10nm, and the key inspections are:

• Metalization layer defects at the oxide layer step
• Metal strip cross-sectional area loss rate <50%
• Zero tolerance for unattached defects in the bonding area

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Implementation suggestions

Supply chain management

Outsourced chips need to be evaluated according to Table 4 for wafer batches:

• Grade A devices must provide chip identification reports
• 22 pieces of sampling passed the high temperature life test with zero failures
• The change in key parameters Δ needs to be continuously monitored

Acceptance process optimization

It is recommended to adopt a three-level acceptance strategy:

1. Incoming inspection: Check the integrity of the identification system
2. DPA analysis: Destructive verification of 3-5 pieces per batch
3. Batch release: Comprehensive judgment based on 6.5 basket selection data