GB/T 6624-1995 in English
SUPERSEDEDStandard method for measuring the surface quality of polished silicon slices by visual inspection
- Issued on:1995-04-18
- Implemented on:1995-01-02
- File Format:PDF
- Delivery:Via email within 1~3 business days
$175.00
《GB/T 6624-1995硅抛光片表面质量目测检验方法》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了在一定光照条件下,用目测检验硅单晶单面抛光片表面质量的方法。本标准适用于硅抛光片表面质量检验。
Scope
This standard specifies the method for visually inspecting the surface quality of silicon single crystal single-sided polished wafers (hereinafter referred to as polished wafers) under certain lighting conditions. This standard applies to the surface quality inspection of silicon polished wafers.

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