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Silicon Surface Inspection

Silicon Surface Inspection, Total:55 items.

The international standard classification for "Silicon Surface Inspection" includes: Semiconducting materials , Testing of metals in general , Testing of metals , Non-destructive testing .

The Chinese standard classification for "Silicon Surface Inspection" includes: Metal physical property test method , Semimetal and semiconductor material in general , Semimetal and semiconductor material analysis method , Basic standards and general methods .


General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China

  • GB/T 31225-2014 Test method for the thickness of silicon oxide on Si substrate by ellipsometer
  • GB/T 6624-2009 Standard method for measuring the surface quality of polished silicon slices by visual inspection
  • GB/T 24575-2009 Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry
  • GB/T 6621-2009 Testing methods for surface flatness of silicon slices
  • GB/T 17455-2008 Non-destructive testing - Metallographic replica techniques of surface examination
  • GB/T 6624-1995 Standard method for measuring the surface quality of polished silicon slices by visual inspection
  • GB/T 23904-2009 Non-destructive testing—Test method for ultrasonic testing by surface wave
  • GB/T 29505-2013 Test method for measuring surface roughness on planar surfaces of silicon wafer
  • GB/T 6621-1995 Test methods for surface flatness of silicon polished slices
  • GB/T 42789-2023 Test method for gloss of silicon wafer
  • GB/T 19921-2005 Test method of particles on silicon wafer surfaces

Professional Standard - Machinery

Group Standards of the People's Republic of China

  • T/IAWBS 002-2017 Test method for surface defect of silicon carbide epitaxial wafer
  • T/IAWBS 010-2019 Detection method for measuring the surface Detection method for measuring the surface quality and micropipe densityof polished monocrystalline silicon carbide wafers-Laser Scattering Method
  • T/FSI 049-2020 Test method for silanol content on the surface of fumed silica

国家市场监督管理总局、中国国家标准化管理委员会

  • GB/T 39238-2020 Non-destructive testing—Ultrasonic testing—Examination for discontinuities perpendicular to the surface
  • GB/T 19921-2018 Test method for particles on polished silicon wafer surfaces
  • GB/T 40279-2021 Test method for thickness of films on silicon wafer surface—Optical reflection method

工业和信息化部/国家能源局

  • JB/T 12465-2017 Non-destructive testing-Test method for colourless penetrant testing of the surface of parts

中国有色金属工业总公司

  • YS/T 25-1992 Silicon polishing wafer surface cleaning method

Korean Agency for Technology and Standards (KATS)

HU-MSZT

British Standards Institution (BSI)

  • BS EN 1370:2011 Founding. Examination of surface condition
  • BS EN ISO 16826:2014 Non-destructive testing. Ultrasonic testing. Examination for discontinuities perpendicular to the surface

YU-JUS

The American Road & Transportation Builders Association

IT-UNI

  • UNI 5112-1963 Fabric: Experiment. Surface Characteristics Inspection

Japanese Industrial Standards Committee (JISC)

  • JIS H 0614:1996 Visual inspection for silicon wafers with specular surfaces

GSO

  • BH GSO ISO 3057:2016 Non-destructive testing -- Metallographic replica techniques of surface examination
  • GSO ISO 16826:2013 Non-destructive testing -- Ultrasonic testing -- Examination for discontinuities perpendicular to the surface
  • BH GSO ISO 16826:2016 Non-destructive testing -- Ultrasonic testing -- Examination for discontinuities perpendicular to the surface

American Society for Testing and Materials (ASTM)

  • ASTM F523-93(1997) Standard Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces

IPC - Association Connecting Electronics Industries

KR-KS

  • KS B ISO 3057-2023 Non-destructive testing — Metallographic replica techniques of surface examination
  • KS B ISO 3057-2018 Non-destructive testing — Metallographic replica techniques of surface examination

SCC

  • DANSK DS/ISO 23157:2022 Determination of the silanol group content on the surface of fumed silica – Reaction gas chromatographic method
  • DANSK DS/EN ISO 16826:2014 Non-destructive testing - Ultrasonic testing - Examination for discontinuities perpendicular to the surface

German Institute for Standardization

  • DIN EN ISO 16826:2014-06 Non-destructive testing - Ultrasonic testing - Examination for discontinuities perpendicular to the surface (ISO 16826:2012); German version EN ISO 16826:2014