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GB/T 8758-2006 in English

GB/T 8758-2006 in English

VALID

Measuring thickness of epitaxial layers of gallium arsenide by infrared interference

  • Issued on:2006-07-18
  • Implemented on:2006-11-01
  • File Format:PDF
  • Delivery:Via email within 1~3 business days
Price(USD): $60.00
$59.00
Standard No: GB/T 8758-2006
Document status: VALID
Title in English: Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
Title in Chinese: 砷化镓外延层厚度红外干涉测量方法
Language: English
File Format: Electronic (PDF)
Delivery: Via email within 1~3 business days
Issued on: 2006-07-18
Implemented on: 2006-11-01
Superseding: GB/T 8758-1988 Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
ICS Classification: 77.040.30-Chemical analysis of metals
Chinese Classification: H21-Metal physical property test method
Professional Classification: GB-National Standard
Related Keywords: epitaxial layer thickness
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Related Topics: infrared
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GBT8758
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GB/T 8758-2006
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本标准适用于砷化镓外延层厚度的测量,测量厚度大于2μm。要求衬底材料的电阻率小于0.02Ω·cm,外延层的电阻率大于0.1Ω·cm。


Scope

This standard applies to the measurement of gallium arsenide epitaxial layer thickness, and the measured thickness is greater than 2 μm. It is required that the electronegativity of the substrate material is less than 0.02Ω•cm, and the electronegativity of the epitaxial layer is greater than 0.1Ω•cm.

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