GB/T 15862-2012 in English

VALID

General specification of ion implantation equipment

Issued on:2012-11-05
Implemented on:2013-02-15
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $210.00
$204.00

Standard No:	GB/T 15862-2012
Document status:	VALID
Title in English:	General specification of ion implantation equipment
Title in Chinese:	离子注入机通用规范
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2012-11-05
Implemented on:	2013-02-15
Superseding:	GB/T 15862-1995 Generic specification for ion implantation equipment
Chinese Classification:	L97-Dedicated processing equipment
Professional Classification:	GB-National Standard
Related Keywords:	ion implantation equipment scopethis standard ion implanters energy ion implanters other ion implanters general specification
Related Topics:	ion implantation reference material injection Universal ion implanter GB/T 15862-2012 parent ion interaction ion range Ion Implantation ion implantation technology ion implanter hydrogen ion inorganic ion Metal ion implanter gb15862 GBT15862 GBT15862-1995 GB/T 15862-2012 ion How does an ion implanter work? Ion implanter basics

《GB/T 15862-2012离子注入机通用规范》由339-1（工业和信息化部（电子））归口，主管部门为工业和信息化部（电子）。

Scope

This standard specifies the terminology, product classification, technical requirements, tests, inspection rules and signs, packaging, transportation and storage of ion implanters. This standard applies to electric energy ion implanters used in semiconductor technology. Other ion implanters can also be used with reference.

More samples: DL/T 5154-2012 JGJ 94-2008 QC/T 942-2021

Sample only — not a preview of GB/T 15862-2012