Ion Implantation
Ion Implantation, Total:6 items.
The international standard classification for "Ion Implantation" includes: Chemical analysis .
The Chinese standard classification for "Ion Implantation" includes: Dedicated processing equipment , Metal physical property test method , Basic standards and general methods .
Professional Standard - Nuclear Industry
- EJ/T 647-1994 Industrial ion implanter for metal
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
- GB/T 15862-2012 General specification of ion implantation equipment
- GB/T 15862-1995 Generic specification for ion implantation equipment
- GB/T 14141-1993 Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array
- GB/T 25186-2010 Surface chemical analysis—Secondary-ion mass spectrometry—Determination of relative sensitivity factors from ion-implanted reference materials
工业和信息化部
- YS/T 1371-2020 Tungsten material for ion implanter
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