GB/T 15862-1995 in English
SUPERSEDEDGeneric specification for ion implantation equipment
- Issued on:1995-01-02
- Implemented on:1996-08-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$127.00
《GB/T 15862-1995离子注入机通用技术条件》由339-1（工业和信息化部（电子））归口，主管部门为工业和信息化部（电子）。
本标准规定了离子注入机的术语、产品分类、技术要求、试验、检验规则和标志、包装、运输、贮存。本标准适用于半导体工艺用电能离子注入机。
Scope
This standard specifies the terminology, product classification, technical requirements, tests, inspection rules and signs, packaging, transportation and storage of ion implanters. This standard applies to electric energy ion implanters used in semiconductor technology. Other ion implanters can also be used with reference.
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