ion implantation technology
ion implantation technology, Total:6 items.
The international standard classification for "ion implantation technology" includes: .
The Chinese standard classification for "ion implantation technology" includes: Dedicated processing equipment .
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
- GB/T 15862-2012 General specification of ion implantation equipment
- GB/T 15862-1995 Generic specification for ion implantation equipment
工业和信息化部
- YS/T 1371-2020 Tungsten material for ion implanter
Professional Standard - Nuclear Industry
- EJ/T 647-1994 Industrial ion implanter for metal
Professional Standard - Electron
- SJ/T 31068-1994 Requirements of readiness and methods of inspection and assessment for ion implantation machines
RU-GOST R
- GOST 25196-1982 Vacuum equipment. Apparatus for ion implantation. General technical requirements
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