GB/T 16596-1996 in English

《GB/T 16596-1996确定晶片坐标系规范》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了利用晶片中心作为极坐标或直角坐标的原点，可用于确定晶片上任意一点位置的晶片坐标系。

Scope

This standard specifies the wafer coordinate system that uses the wafer center as the origin of polar coordinates (r-θ-z) or rectangular coordinates (XYZ), which can be used to determine the position of any point on the wafer. For unpatterned wafers, the native wafer coordinate system can be used directly or with rectangular arrays or polar overlay arrays. This wafer coordinate system can also be used to locate the origin or other reference point of another coordinate system that often represents or records the positional features of localized areas, chips, or patterned arrays on patterned or unpatterned wafers . In this way, the array system can locate the actual geometry of the wafer.