GB/T 28277-2012 in English

VALID

Silicon-based MEMS fabrication technology—Measurement method of cutting and pull-press strength of micro bonding area

Issued on:2012-05-11
Implemented on:2012-12-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $330.00
$321.00

Standard No:	GB/T 28277-2012
Document status:	VALID
Title in English:	Silicon-based MEMS fabrication technology—Measurement method of cutting and pull-press strength of micro bonding area
Title in Chinese:	硅基MEMS制造技术微键合区剪切和拉压强度检测方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2012-05-11
Implemented on:	2012-12-01
ICS Classification:	31.200-Integrated circuits. Microelectronics
Chinese Classification:	L55-Microcircuit in general
Professional Classification:	GB-National Standard
Related Keywords:	bonding strength silicon-based mems fabrication technology measurement method silicon-based mems pull-press strength compressive strength tests
Related Topics:	Bond Shear strength test method Shear strength test Shear strength test Strength detection gb/t28277 Bond strength Bond strength Silicon-based mems manufacturing technology micro-bonding area shear and tensile strength testing method micro area detection Shear Strength Dimensions Shear Strength Dimensions micro shear key and detection Test bond strength Pre-bond strength Detection of Shear Strength Shear strength test method GBT28277 Silicon powder detection technology Bond Shear Test Bond pull test Bonding strength detection National standard testing of tension, compression and bending shears Calculation method of silica gel bonding amount

《GB/T 28277-2012硅基MEMS制造技术微键合区剪切和拉压强度检测方法》由TC336（全国微机电技术标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Scope

This standard specifies the requirements and test methods for testing the bonding strength of tiny bonding areas involved in the processing of silicon-based MEMS. This standard applies to the shear and tensile and compressive strength tests of tiny bonding areas manufactured by microelectronics technology and related microfabrication technologies.

More samples: DL/T 5154-2012 YD/T 3934-2021 JC/T 2453-2018

Sample only — not a preview of GB/T 28277-2012

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