GB/T 36656-2018 in English

VALID

Electronic grade triethylgallium

Issued on:2018-09-17
Implemented on:2019-01-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $160.00
$156.00

Standard No:	GB/T 36656-2018
Document status:	VALID
Title in English:	Electronic grade triethylgallium
Title in Chinese:	电子级三乙基镓
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2018-09-17
Implemented on:	2019-01-01
ICS Classification:	71.100.20-Gases for industrial application
Chinese Classification:	G86-Industrial gas and chemical gas
Professional Classification:	GB-National Standard
Related Keywords:	electronic grade triethylgallium electronic grade triethylgallium introduction interpretation itemindicator triethylgallium purity practical application cases triethylgallium key electronic material
Related Topics:	Electronic balance level three gallium phase transition GB 8978-1996 Level 3 gallium overpotential tertiary glycosylation ps level three Electronic balance level three gallium reading gallium xps peak Three levels of electronic balance Electronic balance level one level two Tertiary tube test Gallium ion titration Gallium 1cm Tablet three tic level three itts level three Triga.gc gallium quantum dots Gallium volatilization Three-stage electronic balance gallium sulfonate Electronic balance Level 1 Level 2 Level 3 Level 1 Level 2 Level 3 Electronic Balance Gallium hydrate ion electronic grade Gallium permanent magnet GB gallium how to read gallium gallium price gallium toxicity gallium price Three-stage electron gun 1st 2nd tertiary carbon atom ps level three Gallium tem GB8978-1996 level three Triple pole inductor gallium mri gb2716+ Level 1+ Level 3+ Level 3 balance Tertiary Literature Three-level electronic balance Gallium ion source Triphenylgallium gallium xps fc level three Level 1, 2, and 3 of electronic balance gallium electrode potential gallium+mri Three-stage balance Gallium Ion Source Gallium 69 hours Gallium ion source Colloidal Gallium Gallium-based organisms GBT36656 GB/T 36656-2018 Electronic balance Level 1 Level 2 Level 3 Electronic grade ethanol Adsorbed gallium ions Electronic balance accuracy level three Electronic grade ethanol national quality Electronic grade phenylacetic acid products Electronic grade trichlorethylene Electronic grade acetonitrile quality Electronic Grade Ethylene International Electronic grade vinyl

《GB/T 36656-2018电子级三乙基镓》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Introduction

Interpretation of the National Standard of the People's Republic of China GB/T 36656—2018

Item		Indicator
Triethylgallium purity (mass fraction)/10-2	99.999 95
	Content of metal elements and other elements	Silver (Ag) content/(μg/g)	< 0.2
	Impurity analysis method	Aluminum (Al) content/(μg/g)	< 0.5

1. Background of Standardization and Analysis of Technology Evolution

GB/T 36656-2018 standard is formulated for the technical requirements of electronic grade triethylgallium, and is mainly applicable to triethylgallium products prepared by three chemical synthesis methods. The standard was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization, and the drafting units include Jiangsu Nanda Optoelectronic Materials Co., Ltd. and China Electronics Technology Standardization Institute.

2. Comparison of standard frameworks

Standard dimensions		GB/T 36656—2018
Technical requirements	Purity index	99.999 95 (mass fraction)
Technical requirements	Impurity content	Silver, aluminum, arsenic and other elements must meet strict limits
Test methods	Inductively coupled plasma atomic emission spectrometry (ICP-OES)	For analysis of metal elements and other impurities

3. Professional term explanation and practical application cases

Triethylgallium (C6H15Ga) is a key electronic material, mainly used to grow compound semiconductor thin films. Its purity and impurity content directly affect the performance of the final product. For example, in semiconductor manufacturing, even trace amounts of metal impurities can cause device failure.

4. Implementation suggestions

Strictly control the quality of raw materials and process parameters during the production process to ensure compliance with the clean plant requirements specified in GB/T 50073.
Use highly sensitive ICP-OES and NMR equipment for impurity analysis to ensure the accuracy of the test results.
Establish a complete quality traceability system to manage each batch of products throughout their life cycle.

More samples: JC/T 2453-2018 DL/T 368-2010 JJG 21-2008

Sample only — not a preview of GB/T 36656-2018

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