GB/T 4937.26-2023 in English
VALIDSemiconductor devices—Mechanical and climatic test methods—Part 26: Electrostatic discharge (ESD) sensitivity testing—Human body model(HBM)
- Issued on:2023-09-07
- Implemented on:2024-04-01
- File Format:PDF
- Delivery:Via email within 5 business days
$776.00
《GB/T 4937.26-2023半导体器件 机械和气候试验方法 第26部分:静电放电(ESD)敏感度测试 人体模型(HBM)》由TC78(全国半导体器件标准化技术委员会)归口,主管部门为工业和信息化部(电子)。
Introduction
Analysis of the core content of the standard
| Technical elements | GB/T 4937.26-2023 requirements | IEC 60749-26:2018 comparison |
|---|---|---|
| Test equipment bandwidth | ≥350MHz | Completely equivalent |
| Pulse rise time | 2-10ns | 2-10ns |
| Decay time constant | 130-165ns | 130-165ns |
Key test equipment requirements
The standard clearly requires that the HBM test system must include:
- Digital oscilloscope: vertical resolution ≥8bit, sampling rate ≥1GSa/s
- Current sensor: rise time <1ns, bandwidth ≥200MHz
- HBM simulator: parasitic capacitance <5pF, in line with the circuit topology in Figure 1
Appendix B specifically emphasizes the need to test the parasitic characteristics of the equipment, including the trailing edge pulse (<4μA@4kV) and the pre-pulse voltage (<5% of the set value)
Pin combination test strategy
The standard provides two pin combination schemes:
- Preferred scheme (Table 2): Based on the interconnection relationship of the power pin group, reduce unnecessary test combinations
- Alternative scheme (Table 3): Full pin matrix test, suitable for situations where design information is incomplete
Appendix C uses a typical case to illustrate: For multi-power domain devices, the scheme in Table 2 can reduce the test volume by 62%
Technical Evolution Analysis
Main improvements compared to the old version of the standard:
- Added two-pin HBM test equipment specification (3.28)
- Refined the definition of coupled non-power pin pairs (Appendix D)
- Introduced the sampling method for I/O pins with the same name (Appendix E)
These changes reflect the ESD testing challenges brought about by the high integration of modern semiconductor devices, especially for:
- Parasite parameter control of 3D packaged devices
- Differential pair ESD protection of high-speed interfaces
- Improved test efficiency of large-scale I/O arrays
Implementation Recommendations
Laboratory Construction Guide:
- Give priority to test equipment that supports low parasitic verification in Appendix B.4
- Establish a daily waveform inspection system (Clause 5.5)
- Increase the frequency of 500Ω load testing for high-frequency devices
Test process optimization:
- Use Table 2 + I/O sampling combination with the same name for devices with >100 pins
- Power supply pin group testing using a unipolar simplified flow (6.6.2.3)
- Developing automated test scripts using the sample program in Appendix C

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