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test volume test efficiency test scripts high-frequency devices test process optimization pin combination test strategy meltblown composite nonwovens dc/dc power converter modules aurantium
GB/T 4937.26-2023 in English

GB/T 4937.26-2023 in English

VALID

Semiconductor devices—Mechanical and climatic test methods—Part 26: Electrostatic discharge (ESD) sensitivity testing—Human body model(HBM)

  • Issued on:2023-09-07
  • Implemented on:2024-04-01
  • File Format:PDF
  • Delivery:Via email within 5 business days
Price(USD): $800.00
$776.00
Standard No: GB/T 4937.26-2023
Document status: VALID
Title in English: Semiconductor devices—Mechanical and climatic test methods—Part 26: Electrostatic discharge (ESD) sensitivity testing—Human body model(HBM)
Title in Chinese: 半导体器件 机械和气候试验方法 第26部分:静电放电(ESD)敏感度测试 人体模型(HBM)
Language: English
File Format: Electronic (PDF)
Delivery: Via email within 5 business days
Issued on: 2023-09-07
Implemented on: 2024-04-01
ICS Classification: 31.080.01-Semiconductor devices in general
Chinese Classification: L40-Semiconductor discrete devices in general
Professional Classification: GB-National Standard
Related Keywords: test volume
test efficiency
test scripts
high-frequency devices test process optimization
pin combination test strategy
Related Topics: hbm
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ivo
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Electrostatic Discharge Susceptibility Model
Plastic packaged device
Semiconductor ESD
esd test equipment
Human body electrostatic discharger detection
Calibration method of human body electrostatic discharger
Human body static discharger

《GB/T 4937.26-2023半导体器件 机械和气候试验方法 第26部分:静电放电(ESD)敏感度测试 人体模型(HBM)》由TC78(全国半导体器件标准化技术委员会)归口,主管部门为工业和信息化部(电子)。


Introduction

Analysis of the core content of the standard

Technical elements GB/T 4937.26-2023 requirements IEC 60749-26:2018 comparison
Test equipment bandwidth ≥350MHz Completely equivalent
Pulse rise time 2-10ns 2-10ns
Decay time constant 130-165ns 130-165ns

Key test equipment requirements

The standard clearly requires that the HBM test system must include:

  • Digital oscilloscope: vertical resolution ≥8bit, sampling rate ≥1GSa/s
  • Current sensor: rise time <1ns, bandwidth ≥200MHz
  • HBM simulator: parasitic capacitance <5pF, in line with the circuit topology in Figure 1

Appendix B specifically emphasizes the need to test the parasitic characteristics of the equipment, including the trailing edge pulse (<4μA@4kV) and the pre-pulse voltage (<5% of the set value)


Pin combination test strategy

The standard provides two pin combination schemes:

  1. Preferred scheme (Table 2): Based on the interconnection relationship of the power pin group, reduce unnecessary test combinations
  2. Alternative scheme (Table 3): Full pin matrix test, suitable for situations where design information is incomplete

Appendix C uses a typical case to illustrate: For multi-power domain devices, the scheme in Table 2 can reduce the test volume by 62%


Technical Evolution Analysis

Main improvements compared to the old version of the standard:

  • Added two-pin HBM test equipment specification (3.28)
  • Refined the definition of coupled non-power pin pairs (Appendix D)
  • Introduced the sampling method for I/O pins with the same name (Appendix E)

These changes reflect the ESD testing challenges brought about by the high integration of modern semiconductor devices, especially for:

  • Parasite parameter control of 3D packaged devices
  • Differential pair ESD protection of high-speed interfaces
  • Improved test efficiency of large-scale I/O arrays

Implementation Recommendations

Laboratory Construction Guide:

  1. Give priority to test equipment that supports low parasitic verification in Appendix B.4
  2. Establish a daily waveform inspection system (Clause 5.5)
  3. Increase the frequency of 500Ω load testing for high-frequency devices

Test process optimization:

  • Use Table 2 + I/O sampling combination with the same name for devices with >100 pins
  • Power supply pin group testing using a unipolar simplified flow (6.6.2.3)
  • Developing automated test scripts using the sample program in Appendix C

Sample only — not a preview of GB/T 4937.26-2023
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