YS/T 893-2013 in English
VALIDHigh-purity Sputtering Titanium Target Used in Electronic Film
- Issued on:2013-10-17
- Implemented on:2014-03-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$175.00
Scope
This standard specifies the requirements, test methods, inspection rules and markings, packaging, transportation, storage, quality certification and contracts (orders) for high-purity titanium sputtering targets for electronic thin films. This standard applies to various titanium sputtering targets used in electronic thin film manufacturing.

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