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Database: 365,228(8 Aug 2026)
  1. HOME
  2. Standards for desktop electron microscope

desktop electron microscope

desktop electron microscope, Total:485 items.

The international standard classification for "desktop electron microscope" includes: Optical measuring instruments , Optics and optical measurements in general , Optical equipment , Linear and angular measurements , Chemical analysis , Physicochemical methods of analysis , Radiographic equipment , Laboratory medicine , Ophthalmic equipment , Protection against crime .

The Chinese standard classification for "desktop electron microscope" includes: Electron optics and other physical optics instrument , Magnifier and microscope , Optical metrological instrument , Chemical Measurement , Length Measurement , Basic standards and general methods , Medical optical instrument and endoscope , Electrochemical, thermochemistry and optical profile type analyzer , Oil shale , General and microsurgical devices , Ophthalmic and ENT surgical devices , Crime judging technology .

Professional Standard - Machinery

National Metrological Verification Regulations of the People's Republic of China

Group Standards of the People's Republic of China

  • T/BSPT 6-2024 Particulate technology—Analysis of sub-micron and nanometer heterostructure—Transmission electron microscopy
  • T/ZZB 0121-2016 Bio-fluorescence microscope
  • T/QGCML 1940-2023 Scanning electron microscope in-situ high temperature mechanical testing device
  • T/CSTM 00166.3-2020 Characterization for graphene materials Part 3 Transmission electron microscope
  • T/SZBX 096-2022 Operation microscopes
  • T/SPSTS 030-2023 Graphene material sheet size measurement using scanning electron microscopy
  • T/CSTM 00162-2020 Calibration methods for transmission electron microscope
  • T/CSP 13-2024 Particulate technology—Analysis of sub-micron and nanometer heterostructure—Transmission electron microscopy

Professional Standard - Education

  • JY/T 011-1996 General rules for transmission electron microscopy
  • JY/T 0581-2020 General analysis rules for transmission electron microscope
  • JY/T 010-1996 General rules for analytical scanning electron microscopy
  • JY/T 0584-2020 General rules of analytical methods for scanning electron microscope

National Metrological Technical Specifications of the People's Republic of China

  • JJF 1916-2021 Calibration Specification for Scanning Electronic Microscopes (SEM)

General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China

Professional Standard - Medicine

Professional Standard - Petroleum

  • SY/T 5162-2014 Analytical method of rock sample by scanning electron microscope
  • SY/T 5162-1997 Analytical Method of Rock Sample by Scanning Electron Microscope
  • SY/T 5162-2021 Analytical method for rock samples by scanning electron microscope
  • SY 5162-2014 Scanning Electron Microscopy Analysis Method for Rock Samples

Shanghai Provincial Standard of the People's Republic of China

  • DB31/T 315-2004 Calibration method of magnification of transmission electron microscope
  • DB31/T 297-2003 Calibration method of magnification of scanning electron microscope

Professional Standard - Ferrous Metallurgy

  • YB/T 4676-2018 Analysis of precipitates of steel-Transmission election microscope method

Taiwan Provincial Standard of the People's Republic of China

Jiangsu Provincial Standard of the People's Republic of China

  • DB32/T 3459-2018 Scanning Electron Microscopy for Measuring the Micro-area Coverage of Graphene Films

Professional Standard - Judicatory

  • SF/T 0139-2023 Examination of soil—Scanning electron microscope/X-ray energy dispersive spectrometry

Professional Standard - Commodity Inspection

  • SN/T 4388-2015 Leather identification―Scanning electron microscopy and optical microscopy

American Society for Testing and Materials (ASTM)

  • ASTM STP 372-1965 Techniques of Electron Microscopy, Diffraction, and Microprobe Analysis
  • ASTM E766-98 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
  • ASTM E766-98(2003) Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
  • ASTM E2090-12 Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy
  • ASTM E2090-00 Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Clean Room Wipers Using Optical and Scanning Electron Microscopy
  • ASTM E210-63(2005) Standard Specification for Microscope Objective Thread
  • ASTM STP 257-1959 Symposium on Microscopy
  • ASTM E766-14 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
  • ASTM E986-97 Standard Practice for Scanning Electron Microscope Beam Size Characterization
  • ASTM E986-04(2017) Standard Practice for Scanning Electron Microscope Beam Size Characterization
  • ASTM E2382-04(2020) Standard Guide to Scanner and Tip Related Artifacts in Scanning Tunneling Microscopy and Atomic Force Microscopy
  • ASTM E986-04(2024) Standard Practice for Scanning Electron Microscope Beam Size Characterization
  • ASTM E3143-18a Standard Practice for Performing Cryo-Transmission Electron Microscopy of Liposomes
  • ASTM E3143-18 Standard Practice for Performing Cryo-Transmission Electron Microscopy of Liposomes
  • ASTM E3143-18b Standard Practice for Performing Cryo-Transmission Electron Microscopy of Liposomes
  • ASTM E2382-04 Guide to Scanner and Tip Related Artifacts in Scanning Tunneling Microscopy and Atomic Force Microscopy
  • ASTM E766-98(2008)e1 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope

International Organization for Standardization (ISO)

  • ISO/TS 21383:2021 Microbeam analysis - Scanning electron microscopy - Qualification of the scanning electron microscope for quantitative measurements
  • ISO/DIS 25498:2024 Microbeam analysis-Analytical electron microscopy-Selected area electron diffraction analysis using a transmission electron microscope
  • ISO/CD 25498:2023 Microbeam analysis — Analytical electron microscopy — Selected area electron diffraction analysis using a transmission electron microscope
  • ISO 8036:2006 Optics and photonics - Microscopes - Immersion liquids for light microscopy
  • ISO 15932:2013 Microbeam analysis.Analytical electron microscopy.Vocabulary
  • ISO/CD 19214:2023 Microbeam analysis — Analytical electron microscopy — Method of determination for apparent growth direction of wirelike crystals by transmission electron microscopy
  • ISO 8036:2015 Microscopes - Immersion liquids for light microscopy
  • ISO 19214:2024 Microbeam analysis — Analytical electron microscopy — Method of determination for apparent growth direction of nanocrystals by transmission electron microscopy
  • ISO 22493:2008 Microbeam analysis - Scanning electron microscopy - Vocabulary
  • ISO 9344:2011 Microscopes - Graticules for eyepieces
  • ISO 16700:2004 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
  • ISO 16700:2016 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
  • ISO/PRF 19012-4:2024 Microscopes
  • ISO 25498:2010 Microbeam analysis - Analytical electron microscopy - Selected-area electron diffraction analysis using a transmission electron microscope
  • ISO 25498:2018 Microbeam analysis - Analytical electron microscopy - Selected area electron diffraction analysis using a transmission electron microscope
  • ISO 19214:2017 Microbeam analysis - Analytical electron microscopy - Method of determination for apparent growth direction of wirelike crystals by transmission electron microscopy
  • ISO 21073:2019 Microscopes — Confocal microscopes — Optical data of fluorescence confocal microscopes for biological imaging
  • ISO 19012-2:2013 Microscopes - Designation of microscope objectives - Part 2: Chromatic correction
  • ISO 19012-4:2024 Microscopes - Designation of microscope objectives - Part 4: Polarization characteristics
  • ISO 11884-2:2007 Optics and photonics - Minimum requirements for stereomicroscopes - Part 2: High performance microscopes
  • ISO 9344:2016 Microscopes - Graticules for eyepieces
  • ISO/DIS 19012-4 Microscopes — Designation of microscope objectives — Part 4: Polarization characteristics
  • ISO 11884-1:2006 Optics and photonics - Minimum requirements for stereomicroscopes - Part 1: Stereomicroscopes for general use
  • ISO 11883:1997 Optics and optical instruments - Microscopes - Marking of stereomicroscopes
  • ISO 19012-1:2013 Microscopes.Designation of microscope objectives .Part 1: Flatness of field/Plan
  • ISO 19012-1:2011 Microscopes - Designation of microscope objectives - Part 1: Flatness of field/Plan
  • ISO 15227:2000 Optics and optical instruments - Microscopes - Testing of stereomicroscopes
  • ISO 8038:2013 Microscopes.Screw threads for objectives and related nosepieces
  • ISO 8578:2012 Microscopes - Marking of objectives and eyepieces
  • ISO 19012-3:2015 Microscopes - Designation of microscope objectives - Part 3: Spectral transmittance
  • ISO 23729:2022 Surface chemical analysis — Atomic force microscopy — Guideline for restoration procedure for atomic force microscopy images dilated by finite probe size
  • ISO 8036:2015 Plus Redline Microscopes - Immersion liquids for light microscopy (includes Redline Version)
  • ISO 8576:1996 Optics and optical instruments - Microscopes - Reference system of polarized light microscopy
  • ISO/TS 24597:2011 Microbeam analysis - Scanning electron microscopy - Methods of evaluating image sharpness
  • ISO 9220:1988 Metallic coatings; measurement of coating thickness; scanning electron microscope method
  • ISO 21466:2019 Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
  • ISO 10934-1:2002 Optics and optical instruments - Vocabulary for microscopy - Part 1: Light microscopy
  • ISO 9220:2022 Metallic coatings — Measurement of coating thickness — Scanning electron microscope method
  • ISO 10934:2020 Optics and optical instruments — Vocabulary for microscopy — Part 1: Light microscopy

The Directorate General of Specifications and Metrology (DGSM)

Kingdom of Bahrain Testing and Metrology Directorate

  • BH GSO ISO 25498:2017 Microbeam analysis -- Analytical electron microscopy -- Selected-area electron diffraction analysis using a transmission electron microscope
  • BH GSO ISO 22493:2017 Microbeam analysis -- Scanning electron microscopy -- Vocabulary
  • BH GSO ISO 15932:2017 Microbeam analysis -- Analytical electron microscopy -- Vocabulary
  • BH GSO ISO 11883:2016 Optics and optical instruments -- Microscopes -- Marking of stereomicroscopes
  • BH GSO ISO 15227:2016 Optics and optical instruments -- Microscopes -- Testing of stereomicroscopes
  • BH GSO ISO 8576:2016 Optics and optical instruments -- Microscopes -- Reference system of polarized light microscopy
  • BH GSO ISO 19012-1:2016 Microscopes -- Designation of microscope objectives -- Part 1: Flatness of field/Plan
  • BH GSO ISO 10934-1:2016 Optics and optical instruments -- Vocabulary for microscopy -- Part 1: Light microscopy
  • BH GSO ISO 10936-2:2017 Optics and photonics -- Operation microscopes -- Part 2: Light hazard from operation microscopes used in ocular surgery

British Standards Institution (BSI)

  • BS ISO 25498:2018 Microbeam analysis. Analytical electron microscopy. Selected area electron diffraction analysis using a transmission electron microscope
  • 24/30479937 DC BS ISO 25498 Microbeam analysis - Analytical electron microscopy - Selected area electron diffraction analysis using a transmission electron microscope
  • BS ISO 22493:2008 Microbeam analysis. Scanning electron microscopy. Vocabulary
  • BS ISO 19214:2024 Microbeam analysis. Analytical electron microscope. Method of determination for apparent growth direction of nanocrystals by transmission electron microscopy
  • BS ISO 10934:2020 Microscopes. Vocabulary for light microscopy
  • 18/30319114 DC BS ISO 20171. Microbeam analysis. Scanning electron microscopy. Tagged image file format for Scanning electron microscopy(TIFF/SEM)
  • BS ISO 8036:2015 Microscopes. Immersion liquids for light microscopy
  • 06/30128226 DC ISO 22493. Microbeam analysis. Scanning electron microscopy. Vocabulary
  • BS ISO 19012-2:2010 Optics and photonics. Designation of microscope objectives. Chromatic correction
  • BS ISO 19012-2:2013 Microscopes. Designation of microscope objectives. Chromatic correction
  • BS ISO 19012-4:2024 Microscopes. Designation of microscope objectives - Polarization characteristics
  • BS 7012-10.2:1997 Light microscopes - Minimum requirements for stereo microscopes - High performance microscopes
  • 24/30474499 DC BS ISO 19214 Microbeam analysis. Analytical electron microscopy. Method of determination for apparent growth direction of wirelike crystals by transmission electron microscopy
  • 12/30245653 DC BS ISO 15932. Microbeam analysis. Analytical electron microscopy. Vocabulary
  • BS ISO 11884-2:2007 Optics and photonics. Minimum requirements for stereomicroscopes. High performance microscopes
  • BS ISO 16700:2004 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
  • BS 7012-14:1997 Light microscopes. Marking of stereomicroscopes
  • 19/30387825 DC BS ISO 10934. Microscopes. Vocabulary for light microscopy
  • BS ISO 11884-1:2006 Optics and photonics - Minimum requirements for stereomicroscopes - Stereomicroscopes for general use
  • BS ISO 8036:2006 Optics and photonics - Microscopes - Immersion liquids for light microscopy
  • 24/30466813 DC BS ISO 10934 Microscopes - Vocabulary for light microscopy
  • BS 7012-10.1:1998 Light microscopes - Minimum requirements for stereo microscopes - Stereo microscopes for general use
  • BS ISO 19012-1:2013 Microscopes. Designation of microscope objectives. Flatness of field/Plan
  • BS ISO 25498:2010 Microbeam analysis - Analytical electron microscopy - Selected-area electron diffraction analysis using a transmission electron microscope
  • BS 7012-12:1997 Light microscopes. Reference system of polarized light microscopy
  • BS 7012-4:1989 Light microscopes-Specification for microscope objective and nosepiece screw threads
  • BS ISO 19012-3:2015 Microscopes. Designation of microscope objectives. Spectral transmittance
  • BS ISO 9344:2011 Microscopes. Graticules for eyepieces
  • BS ISO 9344:2016 Microscopes. Graticules for eyepieces
  • BS ISO 21073:2019 Microscopes. Confocal microscopes. Optical data of fluorescence confocal microscopes for biological imaging
  • BS ISO 19012-1:2011 Microscopes. Designation of microscope objectives-Flatness of field/Plan
  • BS ISO 8255-1:2017 Microscopes. Cover glasses. Dimensional tolerances, thickness and optical properties
  • BS 3836-2:1965 Specification for components of microscopes. Dimensions and marking of microscopes
  • BS ISO 10934-1:2002 Optics and optical instruments. Vocabulary for microscopy-Light microscopy
  • BS 7012-1:1998 Light microscopes - Specification for the magnifying power of microscope imaging components
  • BS ISO 10934-1:2003 Optics and optical instruments - Vocabulary for microscopy - Light microscopy
  • BS 3836-1:1964 Specification for components of microscopes. Microscope cover slips and slides
  • BS 7012-16:1997 Light microscopes-Diameter of interchangeable eyepieces for microscopes with tube length 160 mm
  • 18/30339977 DC BS ISO 21073. Microscopes. Confocal microscopes. Optical data of fluorescence confocal microscopes for biological imaging
  • 12/30266267 DC BS ISO 19012-1. Microscopes. Designation of microscope objectives. Flatness of field/Plan
  • BS 7012-8:1997 Light microscopes - Graticules for eyepieces
  • BS ISO 8578:2012 Microscopes. Marking of objectives and eyepieces
  • BS ISO 21466:2019 Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM
  • BS ISO 8038:2013 Microscopes. Screw threads for objectives and related nosepieces
  • BS ISO 16700:2016 Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification
  • BS 7012-1:1990 Light microscopes-Specification for the magnifying power of microscope imaging components
  • BS ISO 19012-2:2009 Optics and photonics. Designation of microscope objectives-Chromatic correction
  • 23/30444981 DC BS ISO 19012-4. Microscopes. Designation of microscope objectives - Part 4. Polarization characteristics
  • BS 7012-15:1997 Light microscopes - Marking of objectives and eyepieces
  • BS EN ISO 14880-1:2005 Optics and photonics - Microlens array - Vocabulary
  • 09/30199298 DC BS ISO 9344. Microscopes. Graticules for eyepieces
  • BS ISO 23729:2022 Surface chemical analysis. Atomic force microscopy. Guideline for restoration procedure for atomic force microscopy images dilated by finite probe size
  • BS 3836-1:1974 Specification for components of microscopes.-Microscope cover slips and slides and immersion fluid
  • BS EN ISO 9220:1989 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method
  • BS ISO 15227:2000 Optics and optical instruments - Microscopes - Testing of stereomicroscopes
  • BS EN ISO 9220:2022 Metallic coatings. Measurement of coating thickness. Scanning electron microscope method
  • 08/30138435 DC BS ISO 24597. Microbeam analysis. Scanning electron microscopy. Methods for the evaluation of image sharpness
  • 13/30203227 DC BS ISO 13083. Surface chemical analysis. Scanning Probe Microscopy. Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy
  • BS EN ISO 9220:1995 Metallic coatings. Measurement of coating thickness. Scanning electron microscope method
  • BS 7012-4.1:1998 Light microscopes - Specification for microscope objective and nosepiece screw threads - Screw thread type RMS (4/5 in x 1/36 in)

Japanese Industrial Standards Committee (JISC)

GCC Standardization Organization

  • GSO ISO 25498:2015 Microbeam analysis -- Analytical electron microscopy -- Selected-area electron diffraction analysis using a transmission electron microscope
  • GSO ISO 15932:2015 Microbeam analysis -- Analytical electron microscopy -- Vocabulary
  • GSO ISO 22493:2015 Microbeam analysis -- Scanning electron microscopy -- Vocabulary
  • GSO ISO 8036:2015 Optics and photonics -- Microscopes -- Immersion liquids for light microscopy
  • GSO ISO/TS 24597:2013 Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness
  • GSO ISO 19012-1:2015 Microscopes -- Designation of microscope objectives -- Part 1: Flatness of field/Plan
  • GSO ISO 11883:2013 Optics and optical instruments -- Microscopes -- Marking of stereomicroscopes
  • GSO ISO 15227:2015 Optics and optical instruments -- Microscopes -- Testing of stereomicroscopes
  • GSO ISO 9344:2015 Microscopes -- Graticules for eyepieces
  • GSO ISO 9220:2013 Metallic coatings -- Measurement of coating thickness -- Scanning electron microscope method
  • GSO ISO 10935:2015 Microscopes -- Interfacing connection type C
  • GSO ISO 10936-2:2016 Optics and photonics -- Operation microscopes -- Part 2: Light hazard from operation microscopes used in ocular surgery

Korean Agency for Technology and Standards (KATS)

Association Francaise de Normalisation

  • NF ISO 15932:2014 Analyse par microfaisceaux - Microscopie électronique analytique - Vocabulaire
  • NF X21-005:2006 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification.
  • NF S10-500*NF ISO 21073:2020 Microscopes - Confocal microscopes - Optical data of fluorescence confocal microscopes for biological imaging
  • NF ISO 21073:2020 Microscopes - Microscopes confocaux - Données optiques des microscopes confocaux à fluorescence pour l'imagerie biologique
  • XP ISO/TS 24597:2011 Microbeam Analysis - Scanning Electron Microscopy - Methods for Assessing Image Sharpness
  • XP X21-015*XP ISO/TS 24597:2011 Microbeam analysis - Scanning electron microscopy - Methods of evaluating image sharpness
  • NF A91-108:1995 Metallic coatings. Measurement of coating thickness. Scanning electron microscope method.
  • X11-660:1983 Particle size analysis by optical microscope method. General indications on microscope.
  • NF EN ISO 9220:2022 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method
  • NF A91-108*NF EN ISO 9220:2022 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method
  • NF X11-660:1983 Granulométrie - Analyse granulométrique par microscopie optique - Généralités sur le microscope.

Association of German Mechanical Engineers

Military Standards (MIL-STD)

Bureau of Indian Standards

  • IS 13108-2019 Optics and Photonics — Microscopes — Immersion Liquids for Light Microscopy ( Second Revision )
  • IS 3099-1 AND 2-1992 Microscopes - Slips and slides: Specification: Part 1 Microscope slips-2 Microscope slides

Spanish Association for Standardization (UNE)

Institute of Interconnecting and Packaging Electronic Circuits (IPC)

Magyar Szabványügyi Testület

Gosstandart of Russia

  • GOST 21006-1975 Electron microscopes. Terms, definitions and letter symbols
  • GOST 3469-1991 Mikroscopes. Screw threads for objectives. Dimensions
  • GOST 11200-1975 Objectives and body-tubes of the microscopes. Attaching dimensions
  • GOST 3361-1975 Eyepieces and body-tubes of the microscopes. Attaching dimensions
  • GOST R 8.594-2009 State system for ensuring the uniformity of measurements. Scanning electron microscopes

German Institute for Standardization

  • DIN 58272:2009 Medical instruments - Microscopic forceps, fine pattern
  • DIN 58272:2016 Medical instruments - Microscopic forceps, fine pattern
  • DIN 58272:1983 Medical instruments; microscopic forceps, fine pattern
  • DIN SPEC 52407:2015-03 Nanotechnologies - Methods for preparation and assessment for particle measurements with atomic force microscopy (AFM) and transmission scanning electron microscopy (TSEM)
  • DIN 58881:1956 Microscopes - Oculars, fitting dimensions
  • DIN 58888:1979 Microscope eyepiece interface thread DIN RMS-58888
  • DIN 58889:1986 Lenses and oculars for microscops - Marking
  • DIN ISO 8576:2002-06 Optics and optical instruments - Microscopes - Reference system of polarized light microscopy (ISO 8576:1996)
  • DIN 58878:1978 Colour designation of objectives for microscopes
  • DIN EN ISO 9220:2022-05 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method (ISO 9220:2022); German version EN ISO 9220:2022

International Electrotechnical Commission (IEC)

  • IEC PAS 62191:2000 Acoustic microscopy for nonhermetic encapsulated electronic components

American Society of Mechanical Engineers (ASME)

American National Standards Institute （ANSI)

(U.S.) Joint Electron Device Engineering Council Soild State Technology Association

PT-IPQ

RO-ASRO

Swedish Institute for Standards

  • SS-ISO 9220:1989 Metallic coatings - Measurements of coating thickness - Scanning electron microscope method

PL-PKN

National Association of Corrosion Engineers (NACE)

  • NACE Paper 14792-2020 In situ atomic force microscopy and electrochemical measurements of organic inhibitors on mild steel

Ente Nazionale Italiano di Unificazione

  • UNI EN ISO 9220:1998 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method
  • UNI ISO 9220:1990 Metallic coatings. Measurement of coating thickness. Scanning electron microscope method.

Danish Standards Foundation

  • DANSK DS/ISO 9220:2022 Metallic coatings – Measurement of coating thickness – Scanning electron microscope method
  • DS/EN ISO 9220:1995 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method
  • DS/ISO 10936-2:2010 Optics and photonics - Operation microscopes - Part 2: Light hazard from operation microscopes used in ocular surgery

IN-BIS

ESDU - Engineering Sciences Data Unit

  • SPB-M6-3-2010 Apr.08: Atomic Force Microscopy (background to technique)

(U.S.) Ford Automotive Standards

Defense Logistics Agency

European Committee for Standardization (CEN)

  • EN ISO 9220:2022 Metallic coatings - Measurement of coating thickness - Scanning electron microscope method (ISO 9220:2022)

SE-SIS

  • SIS SS-ISO 9220:1989 Metallic coatings — Measurements of coating thickness — Scanning electron microscope method
  • SIS SS CECC 00013-1985 Basic specification: Scanning electron microscope inspection of semiconductor dice

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