JY/T 0584-2020 in English
VALIDGeneral rules of analytical methods for scanning electron microscope
- Issued on:2020-09-29
- Implemented on:2020-12-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
Price(USD):
$250.00
$243.00
$243.00
Introduction
Analysis of the core content of the standard
| Technical modules | Contents of the 1996 version | Additions/modifications to the 2020 version |
|---|---|---|
| Terminology | 12 basic terms | 8 new key technical terms such as Environmental scanning electron microscope and Cathode fluorescence |
| Instrument configuration | Basic SEM functions | Added technical specifications for Electron backscatter diffractometer and Cathode fluorescence system |
| Sample Preparation | General Sample Preparation Methods | New Special Preparation Requirements for Spectroscopy Test and EBSD Samples |
Detailed Explanation of Key Technical Points
4.1 Imaging Mode Selection Matrix
| Imaging Mode | Applicable Samples | Resolution Range | Typical Applications |
|---|---|---|---|
| Secondary Electron Image | Surface Morphology Analysis | 1-10nm | Material Fracture Analysis, Biological Samples |
| Backscattered electron image | Composition contrast analysis | 10-50nm | Alloy phase distribution, mineral identification |
| Cathode fluorescence image | Semiconductor materials | 100-500nm | Defect location, energy band analysis |
5. Laboratory environment control indicators
- Temperature and humidity control: 20±5℃, humidity ≤75%
- Electromagnetic interference: ≤5μT alternating magnetic field
- Vibration control: foundation amplitude ≤5μm (5-20Hz)
Recommendations for the implementation of the standard
Typical application cases
A scientific research institution used a field emission scanning electron microscope in conjunction with an EBSD system to analyze the grain boundary characteristics of titanium alloy:
- Electrolytic polishing was performed according to Clause 7.3.3
- The working distance was set to 15mm, and the accelerating voltage was 20kV
- Orientation contrast images were acquired using a 4-segment backscatter detector
- Scanning step size was 0.1μm, and the acquisition speed was 300 points/second
Instrument selection reference
| Electron gun type | Resolution (nm) | Applicable scenarios |
|---|---|---|
| Tungsten filament | 4 | General material analysis |
| Field emission | 1 | Nanomaterial research |
Sample only — not a preview of JY/T 0584-2020

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