GB/T 18867-2014 in English

SUPERSEDED

Gases for electronic industry―Sulphur hexaflouride

Issued on:2014-12-22
Implemented on:2015-07-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $160.00
$156.00

Standard No:	GB/T 18867-2014
Document status:	SUPERSEDED
Superseded by:	GB/T 18867-2025 Electronic gas—Sulphur hexaflouride
Superseded on:	2025-11-01
Title in English:	Gases for electronic industry―Sulphur hexaflouride
Title in Chinese:	电子工业用气体六氟化硫
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2014-12-22
Implemented on:	2015-07-01
Superseding:	GB/T 18867-2002 Gases for electronic industry--Sulfur hexafluoride
ICS Classification:	71.100.20-Gases for industrial application
Chinese Classification:	G86-Industrial gas and chemical gas
Professional Classification:	GB-National Standard
Related Keywords:	electronic industry ― sulphur electronics industry international relative atomic mass industry sulfur hexafluoride
Related Topics:	fluorine Sulfur hexafluoride micro water meter electronics industry Industrial Gases six six six pillars electronics industry sulfur hexafluoride Liming Chemical gb/t18867 Sulfur hexafluoride industrial grade Sulfur hexafluoride industrial grade Six rank e-mail industrial gas bar Fluorine hexasulfide Fluorinated Greenhouse Gases industrial gas Industrial Aluminum Gas GBT18867 GB/T 18867-2002 GB/T 18867-2014 Gases for the electronics industry Six factors of atmosphere Aluminum fluoride group for electrolysis Gas sulfur hexafluoride for electronic industry Sulfur hexafluoride transportation method Gas hydrogen bromide for electronic industry Sulfur hexafluoride industry for electric power Sulfur hexafluoride related industries Gases for Electronics Industry International Electronic packaging materials sulfide standards Electronic grade sulfur hexafluoride gb18867 gb18867-2014 Fluoride ion industry Headspace+Fluorine Chemicals+

《GB/T 18867-2014电子工业用气体六氟化硫》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC1（全国半导体设备和材料标准化技术委员会气体分会）执行，主管部门为国家标准化管理委员会。
本标准规定了六氟化硫的技术要求、试验方法、标志、包装、贮存及安全等。
本标准适用于硫与氟直接反应并经精制和纯化制备的六氟化硫。该产品主要用作电子工业中化学气相沉积室的清洗剂和等离子蚀刻剂等。
分子式:SF6。
相对分子质量:146.0564192(按2007年国际相对原子质量计算)。

Scope

This standard specifies the technical requirements, test methods, signs, packaging, storage and safety of sulfur hexafluoride. This standard applies to sulfur hexafluoride prepared by the direct reaction of sulfur and fluorine through refining and purification. This product is mainly used as a cleaning agent and plasma etchant for chemical vapor deposition chambers in the electronics industry. Molecular formula: SF₆. Relative molecular mass: 146.0564192 (calculated according to the international relative atomic mass in 2007).

More samples: DL/T 368-2010 NB/T 47013.2-2015 YD/T 3934-2021

Sample only — not a preview of GB/T 18867-2014

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