GB/T 28276-2012 in English

VALID

Silicon-based MEMS fabrication technology—Specification for dissolved wafer process

Issued on:2012-05-11
Implemented on:2012-12-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $210.00
$204.00

Standard No:	GB/T 28276-2012
Document status:	VALID
Title in English:	Silicon-based MEMS fabrication technology—Specification for dissolved wafer process
Title in Chinese:	硅基MEMS制造技术体硅溶片工艺规范
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2012-05-11
Implemented on:	2012-12-01
ICS Classification:	31.200-Integrated circuits. Microelectronics
Chinese Classification:	L55-Microcircuit in general
Professional Classification:	GB-National Standard
Related Keywords:	dissolved wafer process scopethis standard silicon-based mems fabrication technology specification soluble wafer processing technology bulk silicon dissolution process process requirements
Related Topics:	Silicon base mems silicon wafer Dissolved silicon Soluble silicon Silicon solution? Soluble silicon Silica dissolved silicon total silicon Silicon solubility Silicon solubility Manufacturing Technology Silicon base silicon-based technology silicon-based technology Manufacturing Technology Silica lumps dissolve In vitro in silico evaluation GBT28276 Silicon capacitor Liquid ammonia manufacturing process Chemical fiber manufacturing process Silicone Technical Specifications Silicon wafer inspection Handicraft manufacturing Silicon steel sheet technical standards

《GB/T 28276-2012硅基MEMS制造技术体硅溶片工艺规范》由TC336（全国微机电技术标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Scope

This standard specifies the process requirements and process evaluation specifications that should be followed when processing MEMS devices using bulk silicon soluble wafer processing technology. This standard applies to the processing and quality inspection of the bulk silicon dissolution process.

More samples: QC/T 942-2021 YD/T 3934-2021 DL/T 368-2010

Sample only — not a preview of GB/T 28276-2012

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