GB/T 31093-2014 in English
VALIDTest method for stress of monocrystalline sapphire ingot
- Issued on:2014-12-22
- Implemented on:2015-09-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$88.00
《GB/T 31093-2014蓝宝石晶锭应力测试方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了蓝宝石单晶晶锭的应力测试方法。
本标准适用于经过加工后直径为50.8mm~200mm 的c向蓝宝石晶锭的应力测试,其他尺寸蓝
宝石晶锭(以下简称晶锭)的应力测试可参照使用。
Introduction
1. Standard Overview
GB/T31093-2014 "Sapphire Ingot Stress Test Method" is an important standard in my country's semiconductor material field, which aims to standardize the stress test process of sapphire single crystal ingots. This standard is applicable to the stress detection of c-direction sapphire ingots with a diameter range of 50.8mm to 200mm.
2. Background of Standard Formulation
With the rapid development of the semiconductor industry, sapphire materials are increasingly used in optical and electronic devices. Stress is an important factor affecting the quality of sapphire ingots, which is directly related to subsequent processing and performance. Therefore, it is particularly important to formulate a unified test method.
3. Comparison of standard frameworks
| Standard dimensions | GB/T31093-2014 | Comparison with international standards |
|---|---|---|
| Scope | c-oriented sapphire ingot, diameter 50.8mm~200mm | Wide range of applications, including different sizes and orientations |
| Test equipment | Strain meter (as shown in Figure 1) | General purpose interferometry equipment |
| Sample preparation | Orientation accuracy (0001) ±0.5°, surface roughness <1μm | Strictly control the processing technology |
4. Stress test method
Method summary:Use the converging plane polarized light interference test device to judge the stress by observing the changes in the cone light diagram. The optical axis of the crystal is perpendicular to the section and parallel to the optical axis of the instrument. Under the condition of converging light, interference will occur, forming a black cross and concentric interference color rings.
Interference factors:
- Bubbles and inclusions inside the ingot
- Cracks during processing
5. Implementation suggestions
Operation steps:
- Equipment preparation: Make sure the stress meter works normally and place it in a semi-dark room without direct light source.
- Sample treatment: Unpolished samples need to be dripped with refractive oil to ensure the surface is moist.
- Test execution: Scan different positions on the surface of the ingot and record the changes in the conoscopic diagram.
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