GB/T 32386-2026 in English
TO BE VALIDElectronic gas—Tungsten hexafluoride
- Issued on:2026-04-30
- Implemented on:2026-11-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
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| Standard No: | GB/T 32386-2026 |
| Document status: | TO BE VALID |
| Title in English: | Electronic gas—Tungsten hexafluoride |
| Title in Chinese: | 电子气体 六氟化钨 |
| Language: | English |
| File Format: | Electronic (PDF) |
| Delivery: | Via email within 1~3 business days |
| Issued on: | 2026-04-30 |
| Implemented on: | 2026-11-01 |
| Superseding: |
GB/T 32386-2015 Gases for electronic industry―Tungsten hexaflouride
|
| ICS Classification: | 71.100.20-Gases for industrial application |
| Chinese Classification: | G86-Industrial gas and chemical gas |
| Professional Classification: | GB-National Standard |
《GB/T 32386-2026电子气体 六氟化钨》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC1（全国半导体设备和材料标准化技术委员会气体分会）执行，主管部门为国家标准委。
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