mems chip
mems chip, Total:8 items.
The international standard classification for "mems chip" includes: Integrated circuits. Microelectronics .
The Chinese standard classification for "mems chip" includes: Micromodule , Microcircuit in general .
Group Standards of the People's Republic of China
- T/AHEMA 23-2022 Technical Requirements of MEMS VOC Gas Sensor
- T/NLIA 002-2021 Simulation Specification for Potting Process of Automotive MEMS Pressure Sensor
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
- GB/T 33922-2017 Wafer level test methods for MEMS piezoresistive pressure-sensitive die performances
- GB/T 42895-2023 Micro-electromechanical systems(MEMS）technology―Bending strength test method for microstructures of silicon based MEMS
- GB/T 42896-2023 Micro-electromechanical systems(MEMS) technology―Impact test method for nanostructures of silicon based MEMS
- GB/T 42897-2023 Micro-electromechanical systems(MEMS) technology―Tensile strength test method for nano-scale membranes of silicon based MEMS
- GB/T 35010.3-2018 Semiconductor die products—Part 3: Guide for handling, packing and storage
The Institution of Engineering and Technology (IET)
- SILI WAFER BOND TECH VLSI MEMS APPL-2002 Silicon Wafer Bonding Technology for VLSI and MEMS Applications
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