T/CEMIA 030-2022 in English
VALIDPositive photoresist developer for semiconductor manufacture
- Issued on:2022-04-20
- Implemented on:-
- File Format:PDF
- Delivery:Via email within 1~3 business days
Price(USD):
$220.00
$214.00
$214.00
本文件规定了半导体用正胶显影液的分类和标记、要求、检验方法、检验规则以及标志、包装、运输、贮存和安全。
本文件适用于半导体用正胶显影液,其主要组分为通过季铵盐化合物电解制得的四甲基氢氧化铵。
四甲基氢氧化铵的基本信息见附录A中的A.1。
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