GB/T 1557-2018 in English

VALID

Test method for determining interstitial oxygen content in silicon by infrared absorption

Issued on:2018-09-17
Implemented on:2019-06-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $160.00
$156.00

Standard No:	GB/T 1557-2018
Document status:	VALID
Title in English:	Test method for determining interstitial oxygen content in silicon by infrared absorption
Title in Chinese:	硅晶体中间隙氧含量的红外吸收测量方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2018-09-17
Implemented on:	2019-06-01
Superseding:	GB/T 1557-2006 The method of determining interstitial oxygen content in silicon by infrared absorption
ICS Classification:	77.040-Testing of metals
Chinese Classification:	H17-Semimetal and semiconductor material analysis method
Professional Classification:	GB-National Standard
Related Keywords:	interstitial oxygen content test method infrared absorption measurement method oxygen content infrared absorption introduction
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Infrared absorption cell Gaps in γ alumina crystal Oxygen infrared absorption peak Silica infrared characteristic peaks Silica infrared absorption spectrum The detection method of gas liquid and solid samples in infrared spectroscopy is Detection methods for gas, liquid and solid samples in infrared spectroscopy: Method for detecting siloxane content in silicone powder Infrared method to test oxygen content Detection methods for gas, liquid, and solid samples in infrared spectroscopy? Silicone content detection method Liquid infrared testing method Characteristics and general methods of determining drug content by absorption coefficient method Standard infrared absorbing sheet Method for determination of oxygen content in silicon crystals Measuring method for oxygen content in lithium Intermediate method requirements Oxygen content detection in silicon Test method for poplar content in liquids Detection method for silicone content The sample preparation methods for infrared solids include The sample preparation method for infrared solids includes grinding method Standard method for infrared measurement of liquids Solid state infrared measurement method Determination of oxygen content by infrared method How to measure oxygen content in water using iodometric method Measurement method of trace amounts of silicon Methods for synthesizing silica crystals Silicon content in oil Silicon content in oil Method for testing silicon content of silicon negative electrode Infrared moisture content test Method for detecting infrared in liquid pool The most commonly used methods for infrared solid sample preparation are Chromium infrared absorption standard spectrum Crystal content test Amorphous phase content test method Infrared solid sample preparation methods include Transformer absorption ratio measurement method Infrared testing method for liquid samples Infrared liquid loading method Specific methods for measuring UV absorption Liquid infrared testing method gb1557 gb/t1557 Method for measuring solid infrared Solid Infrared Test Method Infrared liquid quantitative method Method for pressing infrared samples Infrared absorption standard spectrum Plant cell gap measurement method Infrared Plane Metrics Measurement Method gb/t1557-2006

《GB/T 1557-2018硅晶体中间隙氧含量的红外吸收测量方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC2（全国半导体设备和材料标准化技术委员会材料分会）执行，主管部门为国家标准化管理委员会。

Introduction

1. Standard Overview

GB/T 1557-2018 is a standard for the infrared absorption measurement method of interstitial oxygen content in silicon crystals, which replaces the previous GB/T 1557-2006 version. This standard is mainly applicable to the determination of interstitial oxygen content in N-type and P-type silicon single crystals, involving the application of normal temperature and low temperature infrared equipment.

2. Key points of standard revision

Revision content	2006 edition	2018 edition
Test range expansion	-	Added a new test range for low-temperature infrared equipment, with oxygen content starting from $0.5\times10^{15}~\mathrm{cm}^{-3}$
Normative references	-	Added GB/T4059, GB/T4060, GB/T29057, GB/T35306
Test principle update	-	For details on low-temperature Fourier transform infrared spectrometers, see $\mathrm{GB/T}35306$

3. Implementation suggestions

Equipment selection:Based on the test requirements, a high-resolution Fourier transform infrared spectrometer (resolution $4~\mathrm{cm}^{-1}$ or better at room temperature) is preferred. For low-temperature testing, equipment with ultra-low temperature environment control is recommended.

Sample preparation:Ensure that the sample thickness is within the range of $0.04~0.40~\mathrm{cm}$ and there is no oxide on the surface. After double-sided polishing, use a micrometer to measure the thickness, and the error should be less than $0.5\%$.

Interference factor control: The humidity in the test environment must be lower than $60\%$ to avoid the absorption of water vapor and carbon dioxide affecting the results. The inclination angle of the sample surface should not exceed $10^\circ$ to reduce the reflection effect.

More samples: DL/T 5154-2012 GB 50021-2001(2009) DL/T 368-2010

Sample only — not a preview of GB/T 1557-2018

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