GB/T 26065-2010 in English

VALID

Specification for polished test silicon wafers

Issued on:2011-01-10
Implemented on:2011-10-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $300.00
$291.00

Standard No:	GB/T 26065-2010
Document status:	VALID
Title in English:	Specification for polished test silicon wafers
Title in Chinese:	硅单晶抛光试验片规范
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2011-01-10
Implemented on:	2011-10-01
Professional Classification:	GB-National Standard
Related Keywords:	polished test silicon wafers scope1 silicon wafers high quality polished silicon single crystal wafers silicon single crystal test pieces metal ion monitoring wafers
Related Topics:	polishing standard silicon wafer crystal Spectrum test test piece Single crystal silicon inspection Detection of single crystal silicon How to test single crystal Spectrum of crystalline silicon Single crystal silicon inspection Polisher Single crystal silicon peak Three-chip board machine How to detect single crystal silicon three chips single crystal fluorescence monolithic photon monolithic photon number of pieces molecular single crystal Light control test piece single crystal fluorescence Polishing test equipment light sheet light silicon wafer for testing Silicon test piece Silicon Single Wafer Orienter Silicon single crystal single chain single crystal Optical film type jar polish platelet cluster Single crystal silicon target GBT26065 GB/T 26065-2010 polishing disc Electronic silicon single crystal Monocrystalline Silicon International Single crystal silicon seed crystal standard project establishment Monocrystalline silicon quality Monocrystalline silicon Japan Single wafer preparation method parabola experiment Standard single crystal for single crystal instrument

《GB/T 26065-2010硅单晶抛光试验片规范》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Scope

1. This standard specifies the technical requirements for silicon single crystal test pieces used for inspection and process control in the manufacture of semiconductor devices. 2. This standard covers characteristic requirements such as size specifications, crystal orientation and surface defects. This standard involves the technical requirements for silicon polished test pieces of all standard diameters from 50.8mm to 300mm. 3. For the specifications of silicon single crystal polished wafers with higher requirements, such as: silicon wafers for particle testing, silicon wafers for photolithography resolution tests, and metal ion monitoring wafers, etc., refer to SEMI24 "Specifications for High Quality Polished Silicon Single Crystal Wafers".

More samples: JC/T 2453-2018 DL/T 368-2010 GB 50021-2001(2009)

Sample only — not a preview of GB/T 26065-2010

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