GB/T 29557-2013 in English
VALIDSurface chemical analysis—Depth Profiling—Measurment of sputtered depth
- Issued on:2013-07-19
- Implemented on:2014-03-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$204.00
《GB/T 29557-2013表面化学分析 深度剖析 溅射深度测量》由TC38(全国微束分析标准化技术委员会)归口,TC38SC2(全国微束分析标准化技术委员会表面化学分析分会)执行,主管部门为国家标准化管理委员会。
本标准规定了溅射深度剖析中测量溅射深度的准则。
本标准适用于结合离子轰击剥离部分固体样品的表面化学分析技术,通常溅射深度可达几微米。
Scope
This International Standard specifies guidelines for measuring sputter depth in sputter depth profiling. This standard is applicable to the surface chemical analysis technique combined with ion bombardment to peel off some solid samples, usually the sputtering depth can reach several microns.

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