GB/T 34971-2017 in English
VALIDGuide for gaseous effluent handling in semiconductor industry
- Issued on:2017-11-01
- Implemented on:2018-02-01
- File Format:PDF
- Delivery:Via email within 5 business days
$301.00
《GB/T 34971-2017半导体制造用气体处理指南》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
Introduction
Semiconductor Manufacturing Gas Treatment Guide: In-depth Interpretation of GB/T 34971-2017 Standard
1. Background of Standard Formulation and Analysis of Technology Evolution
With the rapid development of the semiconductor industry, the problem of waste gas emissions has become increasingly prominent. The GB/T 34971-2017 standard is formulated to standardize the technical requirements for gas treatment in the semiconductor manufacturing process to ensure environmental protection and process safety. The standard combines a variety of emission reduction technologies such as wet scrubbing, adsorption, oxidation, and a detailed classification of different gas characteristics.
2. Comparison of standard frameworks
| Standard dimensions | GB/T 34971—2017 | International advanced level | Difference analysis |
|---|---|---|---|
| Waste gas classification | 9 types of gases such as acid, ammonia, VOC, etc. | Covering all semiconductor process gases | In line with international standards, some details are more specific |
| Treatment technology | Wet scrubbing, adsorption, oxidation, etc. | Including new technologies such as plasma reactors | New POU emission reduction technical requirements |
| System design | Emphasis on modularity and redundancy | Focus on intelligence and real-time monitoring | Domestic standards are more inclined to practicality |
3. Implementation suggestions and case analysis
Implementation suggestions:
- Classification management of process waste gas:Select appropriate emission reduction technology according to different gas characteristics.
- Prioritize the use of POU emission reduction devices:Reduce the risk of pipeline blockage and secondary pollution.
- Focus on system maintenance:Regularly check the performance of adsorbents and scrubbers to ensure long-term and efficient operation.
- Strengthen monitoring capabilities:Equipped with online monitoring equipment to grasp emission indicators in real time.
Actual application case:
A semiconductor manufacturing company uses wet scrubbing technology to treat acidic waste gas, and uses a high-pressure drop filter to remove micron-sized particles. After the system is put into operation, the acid mist removal efficiency reaches more than 95%, significantly improving the workshop environment.
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