JB/T 2965-1992 in English
VALIDPerformance Testing Method of Sputtering Ion Pump
- Issued on:1992-01-01
- Implemented on:1992-01-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
Price(USD):
$220.00
$214.00
$214.00
本标准规定了溅射离子泵性能测试方法。 本标准适用于抽速大于10Ls(-1)的离子泵。
Scope
This standard specifies sputter ion pump performance test methods. This standard applies to ion pumps with pumping speeds greater than 10Ls(-1).
Sample only — not a preview of JB/T 2965-1992

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