Gold ion sputtering apparatus

Gold ion sputtering apparatus, Total:16 items.

The international standard classification for "Gold ion sputtering apparatus" includes: Vacuum technology , Aluminium and aluminium alloys , Other products of non-ferrous metals .

The Chinese standard classification for "Gold ion sputtering apparatus" includes: Vacuum technique and equipment , Light metals and their alloys , Rare refractory metals and their compounds .

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Professional Standard - Machinery

• JB/T 4081-1991 Sputtering ion pump type and basic parameters
• JB/T 4081-2011 Vacuum technology － Sputter-ion pumps
• JB/T 4082-1991 Sputtering ion pump technical conditions
• JB/T 2965-1992 Performance Testing Method of Sputtering Ion Pump

Professional Standard - Electron

• SJ 1780-1981 Ordinary two-electrode sputtering ion pump--Performance specification
• SJ 1781-1981 Sputtering ion pump--Testing methods
• SJ 1779-1981 Ordinary two-electrode sputtering ion pump--Parameters series

General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China

• GB/T 25755-2010 Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics
• GB/T 29658-2013 High-purity sputtering aluminium and aluminium alloy target used in electronic film

Group Standards of the People's Republic of China

• T/QGCML 018-2020 Negative ion emitter

Professional Standard - Non-ferrous Metal

• YS/T 1025-2015 High-purity tungsten and tungsten alloy sputtering target used in electronic film

German Institute for Standardization

• DIN 28429:2003 Vacuum technology - Acceptance specifications for getter ion pumps

RU-GOST R

• GOST 5.1807-1973 Type-GIN-0,5-1M getter-ion pump. Quality requirements of certified products

American Society for Testing and Materials (ASTM)

• ASTM E1162-87(1996) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
• ASTM E1162-87(2001) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
• ASTM E1438-91(2001) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

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