JB/T 4081-2011 in English
VALIDVacuum technology - Sputter-ion pumps
- Issued on:2011-12-20
- Implemented on:2012-04-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
Price(USD):
$210.00
$204.00
$204.00
本标准规定了普通型式的溅射离子泵的型式与基本参数、要求、测量方法、检验规则、标志、包装、运输、贮存及质量保证要求。
本标准适用于普通型式的溅射离子泵。
Scope
This standard specifies the type and basic parameters, requirements, measurement methods, inspection rules, marking, packaging, transportation, storage and quality assurance requirements of ordinary types of sputtering ion pumps (hereinafter referred to as ion pumps). This standard applies to ordinary types of sputter ion pumps.
Sample only — not a preview of JB/T 4081-2011

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