GB/T 25755-2010 in English
VALIDVacuum technology - Sputter-ion pumps - Measurement of performance characteristics
- Issued on:2010-12-23
- Implemented on:2011-10-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$204.00
《GB/T 25755-2010真空技术 溅射离子泵 性能参数的测量》由TC18(全国真空技术标准化技术委员会)归口,主管部门为中国机械工业联合会。
Scope
This standard specifies the measurement methods for the performance parameters of sputter ion pumps (hereinafter referred to as ion pumps). This standard applies to ion pumps with a nominal volume flow rate greater than 10L/s. The standard measures the pressure range of the volumetric flow rate from 1.5×10-3Pa to 1×10-7Pa.

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