GB/T 20229-2022 in English
VALIDGallium phosphide single crystal
- Issued on:2022-03-09
- Implemented on:2022-10-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
Price(USD):
$200.00
$194.00
$194.00
《GB/T 20229-2022磷化镓单晶》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
Introduction
Core changes in the standard revision
| Technical indicators | Requirements of the 2006 version | Changes to the 2022 version |
|---|---|---|
| Electrical properties | Only n-type ingots are specified | New p-type and semi-insulating indicators are added |
| Dislocation density | No requirements | New grading standards (Grades I~III) |
| Grinding sheet specifications | Only 50.8mm diameter | Expanded to 63.5/76.2mm |
Analysis of key technical requirements
1. Electrical performance indicators
The standard divides GaP single crystals into three categories according to the conductivity type:
- n-type doped ingot: sulfur (S), tellurium (Te), zinc (Zn), resistivity 0.01-0.5Ω·cm
- p-type ingot: new iron (Fe) doping requirements, carrier concentration 1×1017-1×1018cm-3
- semi-insulating type: resistivity ≥1×107Ω·cm
2. Dislocation density control
New normative appendix A specifies the corrosion test method in detail:
Key steps:
- Use HNO3:HF:AgNO3=12:8:5 mixed etching solution
- Corrosion in a 70℃±2℃ water bath for 10-12 minutes
- Observe the (111) triangular corrosion pits under a metallographic microscope at 100-500 times
Implementation suggestions
Key points for quality control
- The 17-point test method should be implemented for ingot acceptance (points are taken at a spacing of D/10 of the diameter)
- The total thickness variation (TTV) of the grinding sheet must be ≤15μm (50.8mm specification)
- Surface quality inspection shall be carried out in dark field according to GB/T6624
Standard application scenarios
This standard is particularly suitable for:
- LED epitaxial wafer substrate material preparation
- Microwave power device development
- Surface acoustic wave (SAW) device production
Sample only — not a preview of GB/T 20229-2022

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