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GB/T 8756-2018 in English

GB/T 8756-2018 in English

VALID

Collection of metallographs on defects of germanium crystal

  • Issued on:2018-12-28
  • Implemented on:2019-07-01
  • File Format:PDF
  • Delivery:Via email within 5 business days
Price(USD): $610.00
$592.00
Standard No: GB/T 8756-2018
Document status: VALID
Title in English: Collection of metallographs on defects of germanium crystal
Title in Chinese: 锗晶体缺陷图谱
Language: English
File Format: Electronic (PDF)
Delivery: Via email within 5 business days
Issued on: 2018-12-28
Implemented on: 2019-07-01
Superseding: GB/T 8756-1988 Collection of metallographs on defects of crystalline germanium
ICS Classification: 29.045-Semiconducting materials
Chinese Classification: H80-Semimetal and semiconductor material in general
Professional Classification: GB-National Standard
Related Topics: Germanene
the crystal
crystal diagram
Germanene+
crystal
Exosome defect
Sapphire Crystal Defect Map
Phosphorus deficiency
spectral distribution diagram
Germanium Oxide Spectrum
Statutory Atlas
Level 1 Atlas
Germanium Crystal Defect Map
Spectrum of crystalline silicon
Put the spectrogram
chromosomal defect
nature of the defect
Test Spectrum Press
defect nature
Regulatory flaws
defect nature
Rotagram
graft defect
base body diagram
genetic defect
Bismuth Telluride Crystal Defects
dna defect
dna defect
Crystals and grains
defect time
spin-coating defects
Germanene
Organic Atlas
genetic defect
crystal defect
fetal defects
Organic germanium
Crystal diagram
Twin pole figure
fetal defects
genetic defect
laboratory defect
twin map
defective dna
defective dna
germanium
sensor defect
Distribution map
polarographic defects
Oxygen deficiency
graphs and spectra
level map
germanium transistor
Phosphorus deficiency
Crystals and grains
Primary Spectrum and Secondary Spectrum
Broad Spectrum Distribution Map
Propyl germanium
Spectrum
Primary Spectrum Secondary Spectrum
Primary Spectrum Secondary Spectrum
pole figure crystal
Crystal grain
All-in-one map
time defect
laboratory defect
trap
trap five
cell defect
Enzyme deficiency
Germanium map
Liquid Chromatography
crystal structure defect
Crystal Pole Figure Principle
sample defect
Forging defects
GBT8756
GB/T 8756-1988
GB/T 8756-2018
Antispectral Nyquist plot
AARS defects
gs115 defective type
PUC18 plasmid map
xrd pattern
Chromatogram range requirements
XRD pattern and AAS pattern
Mass spectrum animation
sp3 carbon defect
Germanium powder
Crystal defect representation method
Spin coating defects
gb/t 8756-1988

《GB/T 8756-2018锗晶体缺陷图谱》由TC203(全国半导体设备和材料标准化技术委员会)、全国有色金属标准化技术委员会联合归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。


Introduction

Technical Evolution and Core Changes of Standards

Technical Dimensions GB/T 8756-1988 GB/T 8756-2018 Technical Improvement Points
Number of Atlases 34 defect atlases 44 newly added atlases Increase of 29.4% of typical defect cases
Detection Methods Basic Corrosion Method Only Three new detection technologies including pulse plating Detection sensitivity increased by 5-10 times
Defect classification 2 major categories and 12 minor categories 3 major categories and 18 minor categories Newly added machining defect system

Technical analysis of key defect types

4.1 Typical defects of germanium polycrystal

Oxide defects: When a colored oxide film appears on the surface of the zone melting germanium ingot (see Figure 1), it indicates high-temperature oxidation or organic contamination. It is recommended to use the inert gas protection process, and the oxygen content needs to be controlled at <1ppm.

Void defects: They are divided into surface holes (Figures 3-4) and internal holes (Figure 5), and the main cause is the poor gas discharge during melt solidification. The standard recommends using a step cooling process (cooling rate <5℃/min) to reduce voids by more than 80%.


4.2 Core defects of germanium single crystal

Defect type Crystal plane characteristics Density control index Elimination method
Vacancy cluster (111) plane triangular pit, (100) plane square pit <103/cm2 Gradient cooling + dislocation introduction
Dislocation arrangement Linear arrangement in [110] crystal direction <100/cm2 Thermal field symmetry optimization
Impurity pipeline Longitudinal stripes + arc section Prohibited Small plane effect control

Implementation and application suggestions

Production process optimization

For the scratch defects of germanium polishing sheet (Figure 105-106), it is recommended to:

  1. Use diamond grinding liquid with particle size ≤0.5μm
  2. Polishing pressure is controlled at 20-30kPa
  3. Add online ultrasonic cleaning process

Detection technology selection

For PN junction detection (Figure 76), the priority is:

  • Barium titanate method: resolution of 1μm
  • Electrolytic corrosion method: suitable for batch testing

Technical value of the standard

The new version of the standard establishes a visual judgment system for germanium crystal defects through the digital representation of 44 typical defect maps, providing technical support for improving the qualified rate of germanium materials used in semiconductor devices. Among them, the systematic classification of mechanical processing defects (Chapter 4.3) fills the gap in international standards.

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