GB/T 8756-2018 in English
VALIDCollection of metallographs on defects of germanium crystal
- Issued on:2018-12-28
- Implemented on:2019-07-01
- File Format:PDF
- Delivery:Via email within 5 business days
$592.00
《GB/T 8756-2018锗晶体缺陷图谱》由TC203(全国半导体设备和材料标准化技术委员会)、全国有色金属标准化技术委员会联合归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
Introduction
Technical Evolution and Core Changes of Standards
| Technical Dimensions | GB/T 8756-1988 | GB/T 8756-2018 | Technical Improvement Points |
|---|---|---|---|
| Number of Atlases | 34 defect atlases | 44 newly added atlases | Increase of 29.4% of typical defect cases |
| Detection Methods | Basic Corrosion Method Only | Three new detection technologies including pulse plating | Detection sensitivity increased by 5-10 times |
| Defect classification | 2 major categories and 12 minor categories | 3 major categories and 18 minor categories | Newly added machining defect system |
Technical analysis of key defect types
4.1 Typical defects of germanium polycrystal
Oxide defects: When a colored oxide film appears on the surface of the zone melting germanium ingot (see Figure 1), it indicates high-temperature oxidation or organic contamination. It is recommended to use the inert gas protection process, and the oxygen content needs to be controlled at <1ppm.
Void defects: They are divided into surface holes (Figures 3-4) and internal holes (Figure 5), and the main cause is the poor gas discharge during melt solidification. The standard recommends using a step cooling process (cooling rate <5℃/min) to reduce voids by more than 80%.
4.2 Core defects of germanium single crystal
| Defect type | Crystal plane characteristics | Density control index | Elimination method |
|---|---|---|---|
| Vacancy cluster | (111) plane triangular pit, (100) plane square pit | <103/cm2 | Gradient cooling + dislocation introduction |
| Dislocation arrangement | Linear arrangement in [110] crystal direction | <100/cm2 | Thermal field symmetry optimization |
| Impurity pipeline | Longitudinal stripes + arc section | Prohibited | Small plane effect control |
Implementation and application suggestions
Production process optimization
For the scratch defects of germanium polishing sheet (Figure 105-106), it is recommended to:
- Use diamond grinding liquid with particle size ≤0.5μm
- Polishing pressure is controlled at 20-30kPa
- Add online ultrasonic cleaning process
Detection technology selection
For PN junction detection (Figure 76), the priority is:
- Barium titanate method: resolution of 1μm
- Electrolytic corrosion method: suitable for batch testing
Technical value of the standard
The new version of the standard establishes a visual judgment system for germanium crystal defects through the digital representation of 44 typical defect maps, providing technical support for improving the qualified rate of germanium materials used in semiconductor devices. Among them, the systematic classification of mechanical processing defects (Chapter 4.3) fills the gap in international standards.

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