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polycrystalline silicon silicon tetrachloride silicon polycrystalline test methods period damage calculation equivalence analysis method copper sulfamate value added service network
GB/T 12963-2009 in English

GB/T 12963-2009 in English

SUPERSEDED

Specification for Polycrystalline Silicon

  • Issued on:2009-10-30
  • Implemented on:2010-06-01
  • File Format:PDF
  • Delivery:Via email within 1~3 business days
Price(USD): $40.00
$39.00
Standard No: GB/T 12963-2009
Document status: SUPERSEDED
Superseded by: GB/T 12963-2014 Electronic-grade polycrystalline silicon
Superseded on: 2015-09-01
Title in English: Specification for Polycrystalline Silicon
Title in Chinese: 硅多晶
Language: English
File Format: Electronic (PDF)
Delivery: Via email within 1~3 business days
Issued on: 2009-10-30
Implemented on: 2010-06-01
Superseding: GB/T 12963-1996 Polycrystalline silicon
ICS Classification: 29.045-Semiconducting materials
Chinese Classification: H82-Elemental semiconductor material
Professional Classification: GB-National Standard
Related Keywords: polycrystalline silicon
silicon tetrachloride
silicon
polycrystalline
test methods
Related Topics: polysilicon
polysilicon
Polycrystalline
m2 polycrystalline
crystal
How big is the grain
silicon way
crystallinity crystal
Polycrystalline Thickness Angstrom
Jingduo
Crystal English
Wafer Diversity
How much crystallinity
Polycrystalline vs Single Crystal
Polycrystalline and Amorphous
Silicon crystallization peak
polycrystalline and monocrystalline
Amorphous and Polycrystalline
single crystal polycrystalline
polycrystalline and amorphous
How about single crystal and polycrystalline
Multi-directional
Crystal faces
Crack Jingjing
Crystalline silicon
Silicon crystal
Polymorph
GBT12963
GB/T 12963-1996
GB/T 12963-2009
polycrystal analysis
Polycrystalline
Silicon powder for polycrystalline silicon
Polycrystalline silicon atmospheric emissions
Polysilicon purity
Polycrystalline silicon powder
gb/t 12963-2022
Polycrystalline silicon waste silicon powder detection
gb 12963
iso 12963 gb/t
Silicon wafer
gb/t 12963
gbt12963
gb12963

《GB/T 12963-2009硅多晶》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了硅多晶的产品分类、技术要求、试验方法、检验规则以及标志、运输、贮存。
本标准适用于以三氯氢硅或四氯化硅用氢还原法制得的硅多晶。


1 Scope

This standard specifies the product classification, technical requirements, test methods, test rules and mark, transportation as well as storage for the polycrystalline silicon.
The polycrystalline silicon, which manufactured from lorosilane or silicon tetrachloride by hydrogen reduction process, is adopted in this standard.

2 Normative references

The following documents contain provisions which, through reference in this text, constitute provisions of this standard. For dated reference, subsequent amendments to (excluding corrigenda), or revisions of, any of these publications do not apply. However, all parties coming to an agreement according to this standard are encouraged to study whether the latest edition of these documents is applicable. For undated references, the latest edition of the normative document is applicable to this standard.

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