GB/T 12963-2009 in English
SUPERSEDEDSpecification for Polycrystalline Silicon
- Issued on:2009-10-30
- Implemented on:2010-06-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$39.00
《GB/T 12963-2009硅多晶》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了硅多晶的产品分类、技术要求、试验方法、检验规则以及标志、运输、贮存。
本标准适用于以三氯氢硅或四氯化硅用氢还原法制得的硅多晶。
1 Scope
This standard specifies the product classification, technical requirements, test methods, test rules and mark, transportation as well as storage for the polycrystalline silicon.
The polycrystalline silicon, which manufactured from lorosilane or silicon tetrachloride by hydrogen reduction process, is adopted in this standard.
2 Normative references
The following documents contain provisions which, through reference in this text, constitute provisions of this standard. For dated reference, subsequent amendments to (excluding corrigenda), or revisions of, any of these publications do not apply. However, all parties coming to an agreement according to this standard are encouraged to study whether the latest edition of these documents is applicable. For undated references, the latest edition of the normative document is applicable to this standard.

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