GB/T 27760-2011 in English
VALIDTest method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic step
- Issued on:2011-12-30
- Implemented on:2012-05-01
- File Format:PDF
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《GB/T 27760-2011利用Si(111)晶面原子台阶对原子力显微镜亚纳米高度测量进行校准的方法》由TC279(全国纳米技术标准化技术委员会)归口,主管部门为中国科学院。
Scope
This standard specifies the measurement method for calibrating the z-direction scale of the atomic force microscope by using the Si(111) crystal plane atomic step height sample. This standard is applicable to atomic force microscopes working in the atmosphere or vacuum environment, and its z-direction magnification reaches the maximum level, that is, the z-direction displacement is in the range of nanometers and sub-nanometers. This is the atomic force microscope used to detect semiconductor surfaces, optical devices Detection range frequently used on surfaces and other high-tech component surfaces. This standard does not point out all possible safety issues. Before applying this standard, the user is responsible for taking appropriate safety and health measures and ensuring compliance with the conditions stipulated in the relevant national regulations.

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