GB/T 29506-2013 in English

VALID

300 mm polished monocrystalline silicon wafers

Issued on:2013-05-09
Implemented on:2014-02-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $160.00
$156.00

Standard No:	GB/T 29506-2013
Document status:	VALID
Title in English:	300 mm polished monocrystalline silicon wafers
Title in Chinese:	300mm 硅单晶抛光片
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2013-05-09
Implemented on:	2014-02-01
ICS Classification:	29.045-Semiconducting materials
Chinese Classification:	H82-Elemental semiconductor material
Professional Classification:	GB-National Standard
Related Keywords:	monocrystalline silicon wafers scopethis standard wafers single crystal silicon crystal orientation
Related Topics:	polishing standard silicon wafer crystal Single crystal silicon inspection Detection of single crystal silicon Silicon Spectrum Silicon Spectrum Spectrum of crystalline silicon Single crystal silicon inspection Double jet polishing Crystal English Polisher Single crystal silicon peak Three-chip board machine How to detect single crystal silicon three chips Silicon crystallization peak photometric film How to measure single crystal silicon single crystal + phase single crystal fluorescence crystal polishing monolithic photon monolithic photon molecular single crystal single crystal fluorescence light sheet light crystal light Silicon Single Wafer Orienter Silicon single crystal orientation Silicon single crystal single chain single crystal Optical film type jar polish platelet cluster Single crystal silicon target GBT29506 GB/T 29506-2013 Silicon single crystal polished wafer Silicon polished wafer wafer polishing National production of monocrystalline silicon polishing disc Electronic silicon single crystal Monocrystalline silicon seed technology Monocrystalline silicon seed crystal Photosynthetic silicon energy Silicon single crystal seed crystal Monocrystalline Silicon International Single crystal silicon seed crystal standard project establishment Monocrystalline silicon quality Monocrystalline silicon product quality Monocrystalline silicon Japan Monocrystalline silicon crystal growth furnace Single wafer preparation method Standard single crystal for single crystal instrument Silicon wafer

《GB/T 29506-2013300mm 硅单晶抛光片》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Scope

This standard specifies the terms and definitions, technical requirements, test methods, detection rules and signs of silicon single crystal polished wafers with a diameter of 300 mm, p-type, <100> crystal orientation, and a resistivity of 0.5 Ω·cm~20 Ω·cm. , packaging, transportation, storage, etc. This standard applies to silicon single crystal polished wafers prepared by double-sided polishing of Czochralski single crystal grinding wafers with a diameter of 300 mm. The product is mainly used for substrates meeting the technical requirements of integrated circuit ICs with a line width of 90 nm.

More samples: QC/T 942-2021 JGJ 94-2008 JJG 21-2008

Sample only — not a preview of GB/T 29506-2013

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