GB/T 29504-2013 in English
VALID300 mm monocrystalline silicon
- Issued on:2013-05-09
- Implemented on:2014-02-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$117.00
《GB/T 29504-2013300mm 硅单晶》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
Scope
This standard specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, etc. This standard applies to silicon single crystals prepared by the Czochralski method, and is mainly used to produce 300 mm silicon single crystal polished wafers that meet the technical requirements of integrated circuit ICs with a line width of 0.13 µm or less.

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