GB/T 14264-2024 in English
VALIDTerminology of semiconductor materials
- Issued on:2024-04-25
- Implemented on:2024-11-01
- File Format:PDF
- Delivery:Via email within 10 business days
$1,223.00
《GB/T 14264-2024半导体材料术语》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
Scope
This document defines the general terms and definitions of semiconductor materials, the terms and definitions of material preparation and process and defects, and abbreviations. This document is applicable to the research and development, production, preparation and related fields of semiconductor materials.

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