GB/T 14264-2009 in English
SUPERSEDEDSemiconductor materials - Terms and definitions
- Issued on:2009-10-30
- Implemented on:2010-06-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$699.00
《GB/T 14264-2009半导体材料术语》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
本标准规定了半导体材料及其生长工艺、加工、晶体缺陷和表面沾污等方面的主要术语和定义。
本标准适用于元素和化合物半导体材料。
Scope
This standard specifies the main terms and definitions of semiconductor materials and their growth process, processing, crystal defects and surface contamination. This standard applies to elemental and compound semiconductor materials.

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