GB/T 16594-1996 in English

SUPERSEDED

Micron grade lenght measurement by SEM

Issued on:1996-01-01
Implemented on:1997-04-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $220.00
$214.00

Standard No:	GB/T 16594-1996
Document status:	SUPERSEDED
Superseded by:	GB/T 16594-2008 General rules for measurement of length in micron scale by SEM
Superseded on:	2009-05-01
Title in English:	Micron grade lenght measurement by SEM
Title in Chinese:	微米级长度的扫描电镜测量方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	1996-01-01
Implemented on:	1997-04-01
ICS Classification:	17.040.01-Linear and angular measurements in general
Chinese Classification:	N33-Electron optics and other physical optics instrument
Professional Classification:	GB-National Standard
Related Keywords:	lenght measurement sem scopethis standard measurement micron-level lengths electronic probe analyzers
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《GB/T 16594-1996微米级长度的扫描电镜测量方法》由TC38（全国微束分析标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了用扫描电镜测量微米级长度的方法，适用于测量0.5～10μm的长度，也适用于电子探针分析仪测量微米级长度。

Scope

This standard specifies the method for measuring micron-level lengths with scanning electron microscopy, which is suitable for measuring the length of 0.5-10 μm, and is also suitable for the measurement of micron-level lengths by electronic probe analyzers.

More samples: NB/T 47013.2-2015 GB 18306-2015 YD/T 3934-2021

Sample only — not a preview of GB/T 16594-1996

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